The invention discloses an
extreme ultraviolet recessed surface reflector coated film uniformity assessing method belonging to the
extreme ultraviolet optical technology application field. The method is characterized in that a
film coating die, the shape of which is the same as the shape of the recessed surface reflector, can be processed, and by taking one point of the outer edge of the
film coating die as the starting point, the points can be selected and the holes can be punched in the
film coating die sequentially according to the
helix shape, and the last intersection point between the
helix and the
radius of the starting point can be used as the
terminal point, and then the points can be numbered according to the coordinate positions; the points can be selected and the holes can be punched in the radial straight line between the starting point and the
terminal point, and then the points can be numbered according to the coordinate positions;
quartz glass testing sample wafers are selected, and the ultrasonic cleaning, the slow-pulling and the dehydrating, and the
alcohol drying of the testing sample wafers can be carried out, and then the testing sample wafers can be divided into two groups and are numbered respectively according to the
helix sequence and the radial straight line sequence, and then can be attached to the hole positions; the
extreme ultraviolet single-layer film can be disposed on the testing sample
wafer; the XRD test of the testing sample wafers can be carried out sequentially according to the above mentioned sequences, and then the thickness of the extreme
ultraviolet single-layer film can be analyzed under the same
model parameter.