The invention discloses a mirror
surface shape measurement
system and method based on ultrafast high-precision
laser scanning, and aims to solve the problems that the
surface shape detection precision is low, the
surface shape detection size is small, the
absolute positioning precision is insufficient, and the
system and method are liable to be vibrated in the environment in the conventional surface shape detection technology. The
system specifically comprises a pulse
laser, a beam expanding and splitting module, an interference module, a four-step
phase shift module, a detection module, a receiving module and an upper computer. The pulse
laser emits pulse laser; the beam expanding and light splitting module divides the pulse laser into 0-level
diffraction light and + / -1-level
diffraction light which are parallel to each other; the interference module receives the 0-level
diffraction light and the + / -1-level diffraction light to form multi-level diffraction interference light; the four-step
phase shift module performs four-step phase shift light splitting on the multi-stage diffraction interference light; the detection module receives the phase-shifted
light beam and performs
photoelectric conversion to form a 0-level phase-shifted
signal, a + 1-level phase-shifted
signal and a-1-level phase-shifted
signal; the receiving module receives a 0-level phase shift signal, a + 1-level phase shift signal and a-1-level phase shift signal; and the upper computer is used for restoring the surface shape information of the to-be-measured mirror.