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51results about How to "Reduce foreign matter" patented technology

Vacuum processing system and vacuum processing method of semiconductor processing substrate

The invention provides a device, in which the arrangement of a vacuum processing chamber in a vacuum transfer chamber is optimized and the production performance of the objects to be processed in unit area is high. The invention provides a vacuum processing system of a semiconductor processing substrate and a vacuum processing method using the same, comprising an atmospheric transfer chamber having a plurality of cassette stands, a lock chamber arranged on a rear side of the atmospheric transfer chamber, and a first vacuum transfer chamber connected to a rear side of the lock chamber, wherein the first vacuum transfer chamber does not have any vacuum processing chamber connected thereto and has transfer intermediate chambers connected thereto, and the transfer intermediate chambers have subsequent vacuum transfer chambers connected thereto, and wherein the wafers are transferred via the lock chamber to the first vacuum transfer chamber to be processed in each of the subsequent vacuum processing chambers, which are further transferred via any of the transfer intermediate chambers connected to the first vacuum transfer chamber to the subsequent vacuum transfer chambers, and the respective wafers transferred to the subsequent vacuum transfer chambers other than the first vacuum transfer chamber are transferred to the respective vacuum processing chambers connected to each of the vacuum processing chambers and processed therein.
Owner:HITACHI HIGH-TECH CORP

Casting apparatus and casting method

The casting apparatus comprises a crucible (20) that stores a melt and has an opening on its upper side, a heater for heating the crucible, and a device for supplying an inert gas to an upper portion of an interior of the crucible, where the inert gas supplying device extends to the upper portion of the interior of the crucible and includes a gas flow passage and a gas discharging hole located at a distal end portion of the inert gas supply device. The gas flow passage includes a main gas supply tube placed in a distal end of upper portion of the crucible. The casting apparatus comprises a crucible (20) that stores a melt and has an opening on its upper side, a heater for heating the crucible, and a device for supplying an inert gas to an upper portion of an interior of the crucible, where the inert gas supplying device extends to the upper portion of the interior of the crucible and includes a gas flow passage and a gas discharging hole located at a distal end portion of the inert gas supply device. The gas discharge hole is provided such that a flow of the supplied inert gas from the gas discharging hole is parallel to a surface of the melt in the crucible or is inclined at a predetermined angle to the surface of the melt in the crucible. The gas flow passage includes a main gas supply tube placed in a distal end of upper portion of the crucible, and the gas discharge hole is formed in a side surface of a distal end portion of the gas supply tube. The gas flow passage further includes gas supply pipes branched from a distal end of the main gas supply pipe. The branched gas supply pipes are arranged parallel to the surface of the melt in the crucible. The gas discharge hole is provided in a distal end of the branched gas supply pipes. An independent claim is included for a casting process.
Owner:MITSUBISHI MATERIALS CORP

Double-station press with upper dies and lower dies for producing glass products

The invention relates to a double-station press machine which comprises an upper table top and a lower table top that are fixedly arranged vertically, wherein a pair of hydraulic cylinders is arranged on the upper table top; lower ends of piston rods of the hydraulic cylinders are connected with moving table tops respectively; an upper mould is arranged on the bottom surface of each of the moving table tops; a lower mould which is coaxial with and opposite to each of the upper moulds is arranged on the lower table top; an upper cutter saddle is arranged on one side of each of the moving table tops; a lower cutter saddle is arranged under each of the upper cutter saddles; and cutters suitable for matching vertically are arranged on the upper and lower cutter saddles. The double-station press machine solves the problems that the product surface has break marks, wrinkles, shrinkage and deformation, the yield is low, and the operation is complicated when glasswork with high requirements, such as an optical glass lens, is produced in the prior art. With the adoption of the double-station press machine, the product qualification rate and the yield are increased and the working load is reduced. The practical data shows that the product qualification rate is increased by about 30% and the yield is increased by about 25%.
Owner:朱保生

Double-station press for producing optical glass lenses and glassworks

The invention relates to a double-station press machine which comprises an upper table top and a lower table top that are fixedly arranged vertically, wherein a pair of hydraulic cylinders is arranged on the upper table top; lower ends of piston rods of the hydraulic cylinders are connected with moving table tops respectively; an upper mould is arranged on the bottom surface of each of the moving table tops; a lower mould which is coaxial with and opposite to each of the upper moulds is arranged on the lower table top; an upper cutter saddle is arranged on one side of each of the moving table tops; a lower cutter saddle is arranged under each of the upper cutter saddles; and cutters suitable for matching vertically are arranged on the upper and lower cutter saddles. The double-station press machine solves the problems that the product surface has break marks, wrinkles, shrinkage and deformation, the yield is low, and the operation is complicated when glasswork with high requirements, such as an optical glass lens, is produced in the prior art. With the adoption of the double-station press machine, the product qualification rate and the yield are increased and the working load is reduced. The practical data shows that the product qualification rate is increased by about 30% and the yield is increased by about 25%.
Owner:朱保生
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