The invention provides a
radio frequency MEMS magnetoelectric antenna
chip analysis method based on electromagnetic-force-micro magnetic
coupling. Relates to the field of
radio frequency MEMS, the analysis technology relates to multi-
physics field simulation, based on the existing static-force-static magnetic
coupling MEMS magnetoelectric antenna
simulation technology, the micro-magnetic
ferromagnetic resonance theory and the full-dynamic Maxwell equation are creatively introduced, and the near-field
radiation characteristics of the novel heterostructure
radio frequency MEMS magnetoelectric antenna can be directly simulated and analyzed through the technical method. The method comprises the following steps: establishing a three-dimensional geometric model of the MEMS magnetoelectric antenna
chip, carrying out geometric and material parameter setting on the three-dimensional geometric model, setting boundary conditions of the three-dimensional geometric model, carrying out
mesh generation, introducing a micro-magnetic module on the basis of
coupling of a traditional piezoelectric module and a piezomagnetic module, and carrying out micro-magnetic modeling on the micro-magnetic module. Therefore, an electromagnetic-force-micro-magnetic
coupling equation is constructed, and the electromagnetic-force-micro-magnetic
coupling equation comprises a Maxwell equation for describing electromagnetic
waves, a Newtonian
mechanics motion equation for describing acoustic effects and an LLG equation for describing
magnetization dynamics.