The invention relates to the field of
semiconductor manufacturing, in particular to a novel
oxide heterojunction production method, a novel
transistor and a transparent device. Growing an
indium gallium oxide epitaxial layer on the substrate; and growing an aluminum
gallium oxide epitaxial layer on the
indium gallium oxide epitaxial layer, so that two-dimensional
electron gas is formed at the interface of the
indium gallium oxide epitaxial layer and the aluminum
gallium oxide epitaxial layer, and an indium
gallium oxide / aluminum gallium oxide
heterojunction is formed. The indium gallium oxide / aluminum gallium oxide
heterojunction is used for replacing traditional
silicon substrate doping, so that two-dimensional
electron gas is prepared at the interface of the heterojunction, high carrier concentration is achieved on the premise that an
ionization impurity scattering center is not introduced, the gallium oxide-based conducting layer with high carrier concentration and high mobility is prepared, and the
conductivity of the gallium oxide-based conducting layer is improved. The performance of the gallium oxide device is greatly improved, and the application scene of the gallium oxide device is greatly widened.