The invention discloses an on-chip RC oscillator circuit, and belongs to the technical field of integrated circuits. The on-chip RC oscillator circuit includes a low-power-consumption temperature compensation circuit, a charge and discharge control circuit, a comparator circuit, an RS flip flop, and a buffer. A first NMOS transistor, a first PMOS transistor, a fourth PMOS transistor, a third resistor and a second NMOS transistor in the low-power-consumption temperature compensation circuit form a loop for generating a bias current with a negative temperature coefficient. A second NMOS transistor, a second PMOS tube, a third PMOS transistor, a third NMOS transistor and a second resistor form a loop that generates a positive temperature coefficient current. The two loops implement a negativefeedback connection through the second NMOS transistor, and the first capacitor and the first resistor perform the miller compensation for a negative feedback loop to improve stability. The oscillator circuit only needs four current branches, and the positive and negative temperature coefficient current structure required for temperature compensation is very simple, and the power consumption is low. The first NMOS transistor, the second NMOS transistor and the third NMOS transistor operate at a sub-threshold section, achieving a smaller bias current and consuming less power.