88results about How to "Little loss" patented technology

An illumination optical apparatus and projection exposure apparatus capable of reducing a light quantity loss when a mask is illuminated with a polarized illumination light. An illumination optical system for illuminating a reticle with an illumination light and a projection optical system for projecting the pattern image of the reticle onto a wafer are provided. An illumination light emitted from an exposure light source in a linearly polarized state in the illumination optical system passes through first and second birefringent members having different fast axis directions and is converted into a polarized state that is substantially linearly polarized in a circumferential direction with the optical axis as the center in an almost specific annular area, and them illuminates the reticle under an annular illuminating condition after passing through a fly-eye lens.

The present invention provides an optical microprobe device and method for focusing multimodal radiation with wavelength-scale spatial resolution and delivering the focused radiation to a specimen, including: a radiation source; and one or more of a plurality of optically transparent or semitransparent spheres and a plurality of optically transparent or semitransparent cylinders optically coupled to the radiation source; wherein the one or more of the plurality of optically transparent or semitransparent spheres and the plurality of optically transparent or semitransparent cylinders periodically focus radiation optically transmitted from the radiation source such that radiation ultimately transmitted to the specimen has predetermined characteristics. Preferably, the spheres or cylinders are assembled inside one of a hollow waveguide, a hollow-core photonic crystal fiber, a capillary tube, and integrated in a multimode fiber. Alternatively, the spheres or cylinders are assembled on a substrate. Optionally, the optical microprobe device also includes one or more of a waveguide, an optical fiber, a lens, and an optical structure disposed between the radiation source and the spheres or cylinders. Optionally, the spheres or cylinders are made from optically nonlinear or active materials that permit efficient nonlinear frequency generation and low-threshold lasing using the optical microprobe device.

A two-dimensional photonic crystal surface emitting laser has a laminated structure including: a two-dimensional photonic crystal (2DPC) layer in which refractive index distribution is formed by two-dimensionally arranging air holes in a plate-shaped base member; and an active layer for generating light with wavelength λL by receiving an injection of electric current. The two-dimensional photonic crystal surface emitting laser emits a laser beam in the direction of an inclination angle θ from normal to the 2DPC layer.

A light source unit and reader can include a line light source that is attached to a radiator and a rod lens that is attached above the line light source. The radiator with the line light source and the rod lens attached thereto, and a linear strip-shaped reflector arranged in front of the rod lens, are housed in a carriage. The carriage is supported beneath a contact glass and movable in a direction normal to a longitudinal axis of the line light source. The lens has a section in a plane normal to a longitudinal axis of the lens, in which a surface of the lens facing the light source has a curved line that expands or is convexly facing toward the light source. The opposite surface of the lens from the light source has composite curves including a plurality of continuous curves with different radii of curvature. The composite curves are located on both sides of a plane containing the optical axis of the LED and expand or are convex in an opposite direction from the light source.

A drum breader and coating recirculation system that includes a spreader positioned at an end of the drum, the spreader having a plurality of angled surfaces to distribute coatings evenly; a screening platform positioned downstream of the spreader having a drive device for imparting straight-line angular displacement to the screening platform; and a drum feed conveyor positioned downstream of the screening platform, the drum feed conveyor having a belt extending at least partially along an upward angle.