The application provides a substrate carrier, a conveying
system, a vacuum
system and a method for operating the substrate carrier, the substrate carrier comprising a bearing frame, a substrate
bearing surface, a groove and a heat absorbing sheet, the substrate
bearing surface is used for placing a substrate, a groove is arranged on the bottom side of each substrate
bearing surface, a heat absorbing sheet is arranged on the bottom surface of the groove, the
emissivity of the first surface of the heat absorbing sheet is greater than the
emissivity of the second surface of the groove bottom surface and / or the heat absorbing sheet, in this case, the
low emissivity surface can inhibit heat dissipation, and the high
emissivity surface can allow heat to pass through efficiently, therefore the first surface of the heat absorbing sheet can reabsorb the
thermal radiation of the substrate and transmit to the second surface or the groove bottom surface, and good heat dissipation effect is achieved. This technology is simple and low in cost, meanwhile, the
coating speed does not need to be reduced, and the problem of temperature rise of the substrate can be effectively solved without reducing the
processing efficiency.