To provide a calibration method of a displacement sensor capable of realizing high measurement accuracy, despite calibration work having a small number of
test measurement, and not requiring complicating arithmetic
processing.SOLUTION: In two-dimensional coordinates, an intersection point of an
optical axis of a
light source which irradiates a detection object with light, a surface including a
principal plane of a light receiving lens which forms an image on a light receiving plane of a detection element by reflected light from the detection object, and the surface including the light receiving plane, is set as a base point, and a
principal point of the light receiving lens is set as an original point. A
mathematical model which shows a distance from the base point of the detection object, by a position in a first straight line in which an inclination angle becomes the angle formed by the
optical axis of the
light source and the
principal plane, and shows the distance from the base point to an image forming position in the light receiving plane, by the position in a second straight line in which the inclination angle becomes the angle formed by the
principal plane and the light receiving plane, is used. A parameter in a
correlation equation of the distance from the detection object and the distance between the image forming position and the base point is calculated, based on the plurality of distances from the detection object acquired by
test measurement through a filter obtained on the basis of any setting value of the distance between the image forming position and the base point.SELECTED DRAWING: Figure 1