The invention discloses a method for forming a plurality of product patterns on a large-size
wafer, and the method comprises the steps: preparing an imprint template which comprises a substrate, and a
dielectric layer and a graphic structure layer which are formed on the substrate, the
dielectric layer surrounds the graphic structure layer, and the thickness of the graphic structure layer is greater than or equal to that of the
dielectric layer; coining glue is sprayed on the pattern structure layer of the coining template, and the coining template with the coining glue is obtained; the imprinting template with the imprinting glue is imprinted on the target position of the large-size
wafer, so that a
product pattern is formed on the target position of the large-size
wafer; wherein the outer contour of the
product pattern is the same as the outer contour of the graphic structure layer, and a graphic structure in the
product pattern is complementary with a graphic structure in the graphic structure layer; and repeating the steps, and forming a plurality of product patterns on the large-size wafer, so that the number of the product patterns on the large-size wafer can be increased, and the
utilization rate of the large-size wafer is further improved.