The invention relates to the technical field of plane
machining, and provides an ultra-precision plane
machining process which comprises the following steps: S1, measuring the thickness distribution condition of a workpiece, and determining the removal amount of each point on the workpiece; s2, according to a measurement result, selecting a corresponding matching
algorithm, calculating
residence time distribution or walking speed distribution of each point on the workpiece on the
grinding disc, and generating a motion instruction for controlling a motion mechanism to act; s3, the workpiece is installed on a movement mechanism, and the to-be-machined face of the workpiece is tightly attached to the disc face of a
grinding disc on the
grinding machine; s4, the grinding
machine is started, meanwhile, a movement instruction is input into the movement mechanism, and the movement mechanism controls the workpiece to move on the grinding disc according to the movement instruction in the step S2; s5, the movement mechanism stops acting, the grinding
machine is closed, the workpiece is taken down, and the thickness distribution condition of the workpiece is measured; and S6, according to a measurement result, selecting to finish
machining or repeating the steps S2 to S5 until the thickness distribution condition of the workpiece meets an error requirement.