The invention relates to a cantilever beam based direct heating microwave radiometer of a micro nano electromechanical system. The radiometer is composed of a microwave antenna, a low noise amplifier,a six-port cantilever beam coupler, a microwave frequency and power detection module, an amplifier, a single-chip microcomputer and an LCD; a signal received by the microwave antenna is amplified andthen input to the six-port cantilever beam coupler, a coupled signal is used for power and frequency detection, amplified by the amplifier and then operated by the single-chip microcomputer, and thefrequency and power of the radiation signal are displayed in the LCD. The radiation frequency and intensity of the radiation signal can be obtained at the same time, a direct heating type vertical nano microwave power sensor instead of a traditional diode serves as a microwave power sensor, the radiometer has the advantages of high linearity, low temperature shift and high upper power limit, the thermal conductivity of a polycrystalline silicon nano wire is much lower than that of a traditional body material, the thermal to electric conversion efficiency is improved, the output voltage is increased greatly, and the sensitivity and precision of the radiometer are improved.