The invention discloses a helium ion chromatographic analysis method for a SF6 (sulfur hexafluoride) decomposition product. The method comprises the following steps: separating components of a sample by adopting a combination of four chromatographic columns, comprising a silica gel column, a first Porapak Q column, a second Porapak Q column and a Gaspro capillary column; performing component cutting separation and control by adopting for valves comprising a first valve, a second valve, a third valve and a fourth valve, and respectively analyzing and testing the separated sample by adopting a first PDD detector and a second PDD detector. According to the analysis method, the SF6 decomposition products, such as H2, O2, N2, CO, CH4, CO2, COS, H2S, SOF2, CS2 and other compounds, which cannot be accurately detected by a traditional analysis method can be simultaneously and accurately detected, and the SF6 decomposition products are comprehensively and accurately analyzed, so that the internal operating conditions of SF6 gas insulated equipment are accurately judged, and the safety operation of electrical equipment is guaranteed.