The invention belongs to the technical field of semiconductors, and particularly relates to a
hafnium compound, a precursor composition containing the
hafnium compound, a thin film and a preparation method of the
hafnium compound. The hafnium compound contains
phosphorus and
silicon and can be used as a precursor of a
hafnium oxide film. The
doping of
phosphorus and
silicon can effectively inhibit the growth of
hafnium oxide grains at high temperature. And the hafnium is segregated at the
grain boundary of
hafnium oxide, so that the uniformity of the film is higher. Meanwhile,
oxygen vacancy and
lattice strain are introduced by
doping phosphorus, so that the formation of a monoclinic phase with a low K value is inhibited, and the film can be kept at a relatively high K value; according to the present invention, the Si-O bond is connected with the Hf-O bond to form a mixed and randomly connected Si-O-Hf amorphous network, such that the energy barrier required by
crystallization is improved so as to improve the
thermal stability of the Si-O-Hf amorphous network;