6results about How to "Reduce the effective volume" patented technology

This invention relates to the field of wafer processing equipment technology, and more particularly to a high-efficiency ventilation process chamber and semiconductor processing equipment, comprising a reaction chamber, an annular isolator, and a support. A dielectric window is provided on the top of the reaction chamber, and a window communicating with the dielectric window is opened on the top plate of the reaction chamber. An electrostatic chuck for supporting the wafer is provided inside the reaction chamber, and a ceramic component is arranged around the circumference of the electrostatic chuck. The dielectric window, the window, the annular isolator, the ceramic component, and the electrostatic chuck together form a wafer processing space for confining plasma. This invention avoids the disadvantages of traditional filling structures that compress the overall cavity volume, resulting in a reduction in bushing flow area and increased gas resistance, and significantly shortens the exhaust path of process waste gas, effectively solving the problem of low ventilation efficiency caused by residual gas from previous steps during the alternation of deposition and etching steps.

The application discloses a kind of phosphogypsum leachate processing method and device, it is related to sewage treatment technical field, comprising: reaction tank and fixedly connected in the inside of the reaction tank support seat, the inside of the support seat is rotatably connected with stirring rod, the top of the support seat is equipped with first drive motor, and the output of the first drive motor is fixedly connected with the stirring rod;Suction aid, located in the inside of the reaction tank, for auxiliary with the sewage at the bottom of the reaction tank is pumped to top and mixed reagent discharge.The application is by being provided with suction aid, so that sewage forms the circulating flow of "bottom-top", this process can avoid the local concentration of bottom sewage due to gravity deposition (or pollutant enrichment) too high, while let top not fully mixed sewage and bottom circulating sewage again contact, so that the sewage concentration in the whole reaction tank is more uniform.

The utility model provides a kind of exchangeable groove cutting workbench, including upper layer frame, lower layer frame, upper layer workstation, lower layer workstation, air duct main pipe;Upper layer frame is set in the just above of lower layer frame, upper layer workstation is slidably arranged on upper layer frame, lower layer workstation is slidably arranged on lower layer frame, one pair of upper layer side air duct is provided on upper layer workstation, upper layer main air duct is connected with upper layer side air duct, one pair of lower layer side air duct is provided on lower layer workstation, lower layer main air duct is connected with lower layer side air duct, spoiler is respectively provided in upper layer side air duct and lower layer side air duct;Upper layer air duct interface and lower layer air duct interface are respectively provided on air duct main pipe, upper layer air duct interface is used to intermittently connect with upper layer main air duct, lower layer air duct interface is used to intermittently connect with lower layer main air duct.The workbench solves the problem of poor dust removal effect, uneven wind force and attenuation of traditional workbench, avoids the problem that cutting robot needs to stop and wait during the process of feeding and polishing.

The invention discloses an efficient hydrogen group direct reduction shaft furnace. Comprising an upper preheating reduction section, a middle isobaric transition section and a lower cooling section, the upper preheating reduction section is sequentially composed of a vault, a vertical cylindrical furnace body and a big-end-down circular-truncated-cone-shaped furnace body from top to bottom. The upper part of the middle isobaric transition section is connected with the preheating reduction section, and the lower part of the middle isobaric transition section is connected with the cooling section. The upper preheating reduction section is designed to be the vertical cylindrical furnace body and the circular-truncated-cone-shaped furnace body, the section of the lower circular-truncated-cone-shaped furnace body is correspondingly enlarged along with volume expansion of pellets, and extrusion bonding between pellet particles and extrusion damage to a furnace body lining are effectively buffered.

The present application relates to superconducting magnet stainless steel framework structure technical field, disclose a kind of little liquid helium's stainless steel framework structure, including container outer cylinder and main magnetic field stainless steel framework, sealing structure is equipped between the container outer cylinder and main magnetic field stainless steel framework;The sealing structure includes shielding magnetic field coil stainless steel framework, sealing cylinder and framework end cover, the shielding magnetic field coil stainless steel framework is set in the inside of container outer cylinder, sealing end cover is equipped between the shielding magnetic field coil stainless steel framework and the outer end of container outer cylinder, the sealing cylinder is located in the inside of shielding magnetic field coil stainless steel framework, the sealing cylinder and the inner end of shielding magnetic field coil stainless steel framework are sealed by framework end cover;A kind of little liquid helium's stainless steel framework structure provided by the present application, solve the problem of high cost of prior art use.

This invention discloses a gas storage tank and its preparation method. The gas storage tank includes a tank body and a damping coating. The damping coating is attached to the inner wall of the tank body. The damping coating includes a semi-dry first damping coating layer, a second damping coating layer, and fiberglass cloth. The fiberglass cloth is embedded between the first and second damping coating layers and fused and cured to form the final shape. The beneficial effects of this invention are: it abandons traditional passive noise reduction methods such as external sound insulation cotton and silencers, which have strong penetration and slow attenuation of low-frequency noise and have limited effectiveness. By forming a double-layer coupled structure of a metal substrate and a composite damping layer within the metal wall of the gas storage tank, firstly, when the gas storage tank is subjected to forced vibration, the bending deformation of the metal wall of the gas storage tank will cause the damping coating on the surface to undergo shear deformation synchronously; secondly, the polymer chains and filler particles inside the damping coating will generate internal friction due to relative displacement, converting the mechanical energy of the vibration into heat energy for dissipation, thereby weakening the vibration amplitude and reducing the resonance amplitude from the source.