The application provides a self-temperature-control bulk acoustic
resonator, filter and preparation method, and relates to the technical field of bulk acoustic resonators. The self-temperature-control bulk acoustic
resonator comprises a substrate, a support layer, a bottom
electrode, a piezoelectric layer and a top
electrode which are stacked in sequence, a cavity is arranged between the substrate and the support layer, a light starting layer and a light
refrigeration layer are stacked in sequence on the top
electrode, the light starting layer is used for absorbing heat generated by the
resonator and exciting low-energy
fluorescence when a critical temperature is reached, the light
refrigeration layer can convert high-energy photons under the drive of the low-energy
fluorescence, and the light starting layer and the light
refrigeration layer are matched to convert
heat energy into
light energy for consumption. The self-temperature-control bulk acoustic resonator solves the problem that
heat control of the resonator is not ideal in the prior art, the temperature increases too fast under
high frequency, and the resonator is prone to failure, achieves stable control of the heat of the device under
high frequency and high
power capacity, and is beneficial to guarantee long-term stable operation of the device and greatly improve the
power capacity of the bulk acoustic resonator and the filter.