The invention belongs to the chemical vapor deposition field, in particular to a device of a hot wire chemical vapor diamond deposition device. The device comprises a vacuum chamber, a vacuum obtaining system, a cooling system, an air circuit, a hot wire, a mechanical rotating mechanism, a base platform, a control system, a power supply, and a Hall ion source, wherein the Hall ion source is fixedly installed at the top of the vacuum chamber, the end part of the Hall ion source is installed in the vacuum chamber, the bottom of the Hall ion source is installed at the outside of the vacuum chamber, connected to an anode power supply, the air circuit and a cooling water channel and hermetically communicated with the vacuum chamber, and a hole is arranged at the top of the vacuum chamber and used for connecting a cathode power supply and sealing. The device improves the ionization proportion of reaction gas, increases the synthesized diamond SP3 structure, reduces the resistance of a heater strip by 30-35%, has clear crystal grain facet and compact structure, and greatly improves the quality of the synthesized diamond.