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61 results about "Field point" patented technology

Method for rapidly calculating green function of uniaxial anisotropic layered medium based on DCIM and electromagnetic simulation system

The invention provides a DCIM-based method for rapidly calculating a green function of a uniaxial anisotropic layered medium and an electromagnetic simulation system. The method comprises the following steps: modeling a uniaxial anisotropic layered medium to be simulated; determining a uniaxial anisotropic dielectric material of each layer, and assigning transverse parameters and longitudinal parameters; determining longitudinal coordinates of field point and source point distribution required to be solved, fitting a uniaxial anisotropic medium Green function spectral domain expression under the field source distribution by using a DCIM method, and solving an analytical expression in a spatial domain by using Somerfeld identical equation properties; solving the size of the electromagnetic field on the plane according to the fitted analytical expression; compared with a direct numerical integration method or a finite element method numerical solution using the Green function, the method has the advantages that the airspace analytical expression corresponding to the field source distributed on the plane is directly fitted, so that the solution of the airspace Green function is greatly accelerated, and the calculation efficiency and the calculation precision are both good in an actual example.
Owner:TANGSHAN TECH (NINGBO) CO LTD

Automatic focusing method and system of cell slide scanner

The invention discloses an automatic focusing method and system of a cell slide scanner, and relates to the related field of optical equipment focusing technology.The method comprises the steps that a slide is previewed and scanned, a multi-mode preview image and physical height sensing data are synchronously collected and preprocessed, and then the pre-processed image is obtained; the multi-modal preview image and the corresponding height data are input into a pre-training focus prediction model, a focusing strategy graph aligned with a slide coordinate space is output, and the graph comprises the predicted optimal focus offset, the focusing function recommendation identifier, the focus verification confidence coefficient and the search radius of each view point; according to the focusing strategy graph, a final focus is determined through feedforward positioning, limited verification and conditional adjustment, a scanner objective table is controlled to carry out formal scanning at the final focus position, and a complete scanning image of the cell slide is collected. The problems that a traditional focusing method is long in time consumption and poor in adaptability to complex samples with low contrast, high background fluorescence and scratch pollution are solved, and the adaptive capacity of the focusing process is improved.
Owner:JIANGSU MICROCONTROL BIOTECHNOLOGY CO LTD

Telescope adjustment method, device, equipment and medium

The invention discloses a telescope installation and adjustment method, device and equipment and a medium, and relates to the technical field of optical installation and adjustment, and the method comprises the steps: obtaining an ideal wave surface diagram of a telescope to be installed and adjusted at a target field point through optical simulation software, and adding a plurality of misalignment amounts to the optical simulation software, extracting a plurality of corresponding maladjustment wavefront diagrams at the target view field point; according to the plurality of misalignment amounts and the plurality of misaligned wavefront diagrams, determining wavefront diagram sensitivities corresponding to the plurality of misalignment amounts, and combining the wavefront diagram sensitivities to obtain a wavefront diagram sensitivity matrix; an interferometer is used for collecting an actually-measured wave surface diagram of the telescope to be installed and adjusted at the target view field point, and wave surface diagram variable quantities caused by a plurality of misalignment quantities are determined through the actually-measured wave surface diagram and the ideal wave surface diagram; and based on the wave surface diagram variable quantity and the wave surface diagram sensitivity matrix, establishing a relationship between the target misalignment quantity vector and the actually measured wave surface diagram so as to determine the target misalignment quantity vector, and carrying out adjustment operation on the telescope to be adjusted according to the target misalignment quantity vector.
Owner:CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI

A three-dimensional city natural landscape point cloud online processing system based on deep learning

The application discloses a ground three-dimensional laser scanning point cloud collection system and relates to the field of three-dimensional point cloud data processing of the ground; the size of data input is 10 square meters; a KPConv algorithm is improved; the characteristics of each input point are expanded; Max Pooling is used to aggregate the relative position and the Euclidean distance of the field points and the center point; Average Pooling is used to aggregate the field characteristics of each point extracted through the multi-layer KPConv into global characteristics; and a set of point cloud visualization websites is deployed by using WebGL.
Owner:SICHUAN AGRI UNIV

A high-power microwave near-field radiation field intensity distribution test method and system

The application discloses a kind of high-power microwave near-field radiation field intensity distribution test methods, comprising: constructing the field point grid for representing high-power microwave near-field, by obtaining field intensity gradient step and gradient coefficient, the field intensity discrete data of field point grid is calculated, and after difference estimation, the radiation field intensity distribution of the high-power microwave near-field is represented;The field intensity of grid uniform point distribution method test is used as initial field point data, the radiation field intensity gradient distribution is calculated, and then the gradient coefficient of each grid is calculated, and the grid encryption of three levels is carried out to different grids, according to the grid arrangement field intensity test point after encryption, the field intensity discrete data of each field point is obtained.Kriging space interpolation algorithm is used to carry out interpolation estimation calculation to the field intensity discrete data obtained by grid gradient encryption point distribution test, linear unbiased optimal estimation is carried out to known field intensity data sample in limited domain, and finally the continuous high-power microwave near-field radiation field intensity distribution diagram is obtained.
Owner:GUIZHOU AEROSPACE INST OF MEASURING & TESTING TECH

Turning lens testing method and system

According to the turning lens test method and system provided by the invention, a collimator can rotate in a rotation plane by taking an entrance pupil point of a to-be-tested turning lens as a center, and the rotation plane can rotate around an incident optical axis of the to-be-tested turning lens, so that measurement of any field of view point is realized, and a detection lens can realize three-axis high-precision movement, so that the detection precision is improved. The objective of detecting the whole image surface and performing out-of-focus detection on any view field point is achieved, the measurement problem of a non-rotational symmetry optical system can be solved, and various optical specifications of the bent lens can be effectively detected.
Owner:HONGJING OPTOELECTRONICS (XIANTAO) TECH CO LTD

Sound field calculation method fusing ridge estimation-truncated singular value method

The invention discloses a sound field calculation method fusing ridge estimation-truncated singular value method, and the method comprises the steps: 1) constructing an acoustic inverse problem solving model based on an inversion formula of sound source intensity Q; 2) inputting the measured sound pressure column vector PH into an acoustic inverse problem solving model, and solving the acoustic inverse problem solving model by using an RE-TSVD algorithm to obtain sound source intensity; and 3) predicting the sound pressure of any field point according to the sound source intensity and the transfer matrix from the equivalent source point to the target field point. According to the method, side lobe interference can be effectively suppressed, main lobe information of a larger sound field is reserved, and the method has better sound source recognition and positioning performance.
Owner:CHONGQING UNIV

A method for identifying a medium of a power device based on a digital-analog drive

PendingCN122634412AEquivalent source methodReal-time data
The application relates to the technical field of power detection, and discloses a power equipment medium identification method based on digital-analog driving, which comprises the following steps: constructing an equipment geometric field and arranging boundary measuring points; obtaining physical quantity and normal derivative data of the measuring points through non-invasive measurement and fitting; based on a physical control equation, unknown medium parameters are converted into equivalent source terms through standardization and an equivalent source method, and then the boundary integral equation is converted into the boundary integral equation through a boundary element method, so that the measurement data and the internal source terms are associated; a surface quadrature neural network is constructed, the field point coordinates and the boundary data are taken as inputs, the internal equivalent source term distribution is output, and a loss function is constructed based on the boundary integral equation to train the network; real-time data are calculated forwardly by using the trained network, the equivalent source terms are obtained, and the medium distribution is inversed, the application provides the power equipment medium identification method based on the digital-analog driving, which can quickly judge the cause of the internal condition of the equipment and perform tracing and positioning.
Owner:XI AN JIAOTONG UNIV

Multiplexing adaptive optics system and method for rapid high-resolution imaging in deep tissue

PCT designated stageWO2026051570A1MicroscopesHigh resolution imagingOphthalmology
A multiplexing adaptive optics method for deep-tissue imaging is provided, comprising: providing a first optical beam and a group of second optical beams, each with lower intensity and distinct modulation frequencies; combining the beams with temporal overlap to form a composite excitation beam; focusing the composite beam into a sample such that the second optical beams are laterally separated in the focal plane; detecting a signal excited by the composite beam; demodulating the signal with reference frequencies to compute phase and amplitude data at each modulation frequency and obtain a second signal; performing spatial measurements of the first beam relative to the second beams to derive down-sampled electric-field point spread functions; and merging the functions to reconstruct a full-sampled point spread function for identifying and correcting optical aberrations within the sample.
Owner:THE HONG KONG UNIV OF SCI & TECH

Autonomous following method and system of leg-foot robot

The invention belongs to the technical field of robots. According to the autonomous following method and system of the leg-foot robot, the leg-foot robot provided with a laser radar communicates with a to-be-followed mobile terminal, the leg-foot robot and the mobile terminal carried by patrol personnel are each provided with a UWB module, a target point of the mobile terminal is converted into a robot coordinate system, and then the robot coordinate system is started; the method comprises the following steps: carrying out downsampling on laser radar three-dimensional point cloud voxels, screening near-field points, filtering heights, projecting into a two-dimensional obstacle boundary point set, and expanding obstacle points; and taking a minimum value by combining the lateral safety threshold value and the same-direction safety threshold value to obtain an effective safety distance, judging the reachability of a target point, and selecting an optimal middle point from an obstacle gap to generate a track when the target point is safe. According to the method, the autonomous following stability and safety of the leg-foot robot in a complex environment are improved, the calculation load is reduced, and the path planning rationality is enhanced.
Owner:SHANDONG YOUBAOTE INTELLIGENT ROBOTICS CO LTD

Method for evaluating measurement values of an aberration of a projection lens

A method for evaluating measured values of projection lens (22) aberration(s) determined at plural field points in a field plane of the projection lens which has a plurality of optical elements (E1-E4) guiding exposure radiation and an optical element manipulator system (M1-M4) for carrying out a rigid body movement. The method includes: providing a fit function (62) having a polynomial function (64) that depends on the spatial coordinates defining a field plane and a rigid-body-sensitivities (70) term (66) for multiple locations in the field plane each describing a dependence of the aberration (63) on a degree of freedom of movement (68) at the relevant locations that is controllable by the manipulator system. The method further includes extrapolating the measured values (50) determined at the plural field points (52) to further field points (56) of the projection lens by fitting the fit function to the determined measured values.
Owner:CARL ZEISS SMT GMBH +1

Method for reconfiguring strong dynamic pressure field of liquid tank and global safety evaluation

PendingCN122655589AImprove forecast accuracyEliminate experimental random errorsLiquid mediumFluid solid coupling
The application provides a liquid tank strong dynamic load pressure field reconstruction and global safety evaluation method, comprising the following steps: S100, establishing a three-dimensional coordinate system of the liquid tank, obtaining actual impact point coordinates and field point position coordinates, and calculating the Euclidean distance of wave front propagation and the deflection angle relative to the ballistic axis; S200, constructing a pressure field model containing anisotropic angle modulation terms and distance attenuation terms, and introducing a fluid-solid coupling phase shift parameter in the anisotropic angle modulation terms; S300, determining the optimal eigenvalue of the fluid-solid coupling phase shift parameter by minimizing the prediction error through an optimization algorithm, so as to represent the wave front lag or distortion effect of the shock wave when propagating in the limited liquid medium; S400, generating a normalization factor based on the nonlinear transfer function solved out of the optimal eigenvalue η , performing cleaning of experimental data; or directly calculating the impact pressure estimation value at the weak point based on the perceived impact point and the preset virtual point coordinates to perform structure safety evaluation.
Owner:NANJING UNIV OF SCI & TECH

A lidar-based wave spectrum analysis method and system

The application belongs to the technical field of marine monitoring, and discloses a wave spectrum analysis method and system based on a laser radar.The method comprises the following steps: obtaining a plurality of concentric circles in the obtained wave field point cloud data; matching the discrete time domain signals of the wave height corresponding to the concentric circles and the derivative of the wave height with respect to time, and calculating the discrete values of the amplitude of the wave spectrum with respect to frequency; calculating unknown parameters in a directional spread function; and multiplying the discrete values of the amplitude of the wave spectrum with respect to frequency and the spread function to obtain the discrete values of the directional spectrum in frequency and direction, i.e., realizing the analysis of the wave spectrum. Through the application, the problem of realizing the analysis of the wave field spectrum and the directional spectrum by using point cloud data in the analysis of the wave field is solved.
Owner:HUAZHONG UNIV OF SCI & TECH

Method of determination of optical properties of an optical system

A method of determining optical properties of an optical system having an illumination system to illuminate an object field and a projection system to image the object field into an image field, comprises: providing an illumination of the object field via an illumination pupil comprising a plurality of pupil spots; providing an optical element with an optical surface comprising a plurality of shifting optical areas which effect an individual direction shift, depending on the respective shifting optical area, of an illumination beam entering the respective shifting optical area; calibrating the individual direction shift by measuring a pupil spot shift resulting from the shifting optical areas via a measuring pupil in the illumination beam path after the optical element for each of the pupil spots for a plurality of separate field points within the object field; and calculating the optical properties to be determined from the measured pupil spot shift.
Owner:CARL ZEISS SMT GMBH

Motion posture determination method and device, electronic equipment and storage medium

The invention provides a motion posture determination method and device, electronic equipment and a storage medium, and relates to the technical field of artificial intelligence, in particular to the technical field of computer vision. Dividing the first to-be-processed point cloud to obtain a first object point cloud set for representing a target object and a field point cloud set for representing a sports field; in response to the fact that the distance between the point with the minimum target dimension value in the first object point cloud set and the target plane is smaller than a first preset threshold value, the collection moment of the first to-be-processed point cloud is determined as the motion starting moment of the target object; according to the angle of the fitting line segment of the first object point cloud set relative to the target plane, determining the motion posture of the target object at the motion starting moment; the fitting line segment is obtained by performing linear fitting on the first object point cloud set.
Owner:BEIJING BAIDU NETCOM SCI & TECH CO LTD

Near fault pulse type seismic motion synthesis method considering seismic source characteristics

The invention relates to the technical field of seismology, and provides a near fault pulse type seismic motion synthesis method considering seismic source characteristics, which comprises the following steps: 1) obtaining seismic motion horizontal component coherence coefficients among field points; 2) constructing a power spectrum matrix between field points; 3) decomposing the power spectrum matrix, calculating to obtain an amplitude and a phase angle, and synthesizing a stable seismic oscillation time history by adopting a trigonometric series method; 4) synthesizing stationary seismic oscillation by using a non-stationary modulation function; 5) predicting pulse occurrence probabilities corresponding to parallel and vertical fault components at the design position of the near fault region; 6) calculating to obtain a pulse period, a pulse amplitude, a pulse shape parameter, a pulse phase angle and a pulse peak arrival time corresponding to the horizontal component, and synthesizing a low-frequency velocity pulse time history of the horizontal component; and 7) superposing the synthesized non-stationary seismic oscillation time history corresponding to the same horizontal component and the equivalent velocity pulse on the time history. The method can better perform seismic oscillation synthesis.
Owner:SOUTHWEST JIAOTONG UNIV

A method and system for airfoil flow field reconstruction based on boundary observation guidance and interpolation residual correction

PendingCN122508727AAlgorithmClassical mechanics
This invention relates to a method and system for reconstructing airfoil flow fields based on boundary observation guidance and interpolation residual correction. The method includes the following steps: S1: Acquire airfoil geometry, operating parameters, flow field query points, and sparse field observations and / or sparse surface pressure observations; S2: Generate observation value channels and observation mask channels to form field point node features and boundary node features; S3: Construct a field point map and perform spatial neighborhood message passing; S4: Construct a boundary observation map and propagate airfoil geometry and surface pressure information; S5: Selectively inject boundary observation representations into field point representations through gated boundary-to-field point fusion; S6: Construct interpolation priors, predict residual correction amounts using graph networks, and obtain a complete high-resolution airfoil flow field through replacement. This invention can uniformly handle flow field super-resolution, surface pressure-assisted reconstruction, and hybrid observation reconstruction, reducing observation and computation costs and improving reconstruction accuracy in unobserved and near-wall regions.
Owner:CHONGQING UNIV

A method for calculating escape velocity of asteroid surface considering rotation and terrain influence

PendingCN122452136AEffective potentialThree dimensional shape
The application relates to a kind of asteroid surface escape velocity calculation method considering rotation and terrain influence, comprising: obtaining the three-dimensional shape model of target asteroid and carrying out discrete, reading the vertex set and triangular facet set of polyhedron, carrying out gravity field modeling, establishing standard polyhedral gravity model;Define the logarithmic kernel function of each edge of each triangular facet, to determine the gravitational potential of target asteroid on any field point;Establish star-fixed coordinate system in standard polyhedral gravity model, determine the rotation speed of any point on the surface of target asteroid, thereby define the effective potential upper bound and the inertial system speed of the release instant of the particle on the surface of target asteroid;Based on the minimum escape condition that the kinetic energy of the particle on the surface of target asteroid is equal to the corresponding effective potential upper bound, determine the minimum normal escape velocity of the particle. Compared with the prior art, the application can quickly obtain accurate minimum escape velocity and corresponding escape direction at any surface point.
Owner:TONGJI UNIV

Method for automatically searching standing position of crane

The invention discloses a method for automatically searching a crane station, which belongs to the technical field of cranes, is used for crane station selection, and comprises the following steps: carrying out preliminary selection on the crane station according to vectorized field photogrammetric data to obtain a selectable set of the crane station; detecting the feasibility of the optional set of the filtered crane stations on the basis of the field site cloud data to obtain feasible crane stations, and performing collision check detection during secondary hoisting on each feasible crane station on the basis of the field site cloud data and crane parameters in the feasible crane stations to obtain a unique feasible crane station. According to the method, a standardized decision-making model and a quantitative analysis system are established, so that the dependence on personal experience is effectively reduced, and the scientificity and consistency of a station scheme are improved; automatic data processing and an intelligent algorithm are adopted, site parameters and equipment information are rapidly analyzed, and the scheme making period is greatly shortened.
Owner:SHANDONG UNIV OF SCI & TECH

A Stochastic Simulation Method for Seismic Ground Motion Field Based on Spatial Correlation

This invention relates to the field of seismology, and in particular to a method for stochastic simulation of ground motion fields based on spatial correlation. It consists of two parts: a single-point ground motion model and a spatial correlation model, specifically including the following steps: Step 1: Constructing a time-frequency power spectrum model of a single-point ground motion; Step 2: Constructing prediction equations for the time-frequency power spectrum parameters; Step 3: Transforming the time-frequency power spectrum into a time history; Step 4: Constructing a spatial correlation model of the time-frequency power spectrum parameters. This invention significantly improves the speed of ground motion field simulation, and by introducing spatial correlation of model parameters, it effectively characterizes the correlation of time-frequency characteristics between field points in space, enabling the simulated ground motion field to conform to physical understanding.
Owner:HARBIN INST OF TECH

Acoustic impedance in-situ measurement method based on array center reflection coefficient optimization

The invention provides an acoustic impedance in-situ measurement method based on array center reflection coefficient optimization, which comprises the following steps: arranging a tested sound source in a semi-open space containing a reflection boundary, arranging a microphone array near the tested sound source to form a holographic sound pressure measurement surface, and arranging a reference microphone near the boundary; starting a tested sound source, and collecting sound pressure superposed by sound source radiation and boundary reflection through the microphone array and the reference microphone; describing a half-space sound pressure field by linear superposition of a half-space spherical wave basis function to obtain a half-space sound pressure field mathematical model taking an array center field point reflection coefficient as a variable; traversing all values in the value range of the field point reflection coefficient of the array center, solving a primary function coefficient, reconstructing the sound pressure at the reference microphone, and determining the optimal reflection coefficient of the array center by taking the minimum relative error between the reconstructed sound pressure and the measured sound pressure as a criterion; and calculating the boundary acoustic impedance rate according to the array center optimal reflection coefficient. And the calculation precision under the condition of a large-aperture array is improved.
Owner:湖北东湖实验室

Super-resolution real-time event-triggered scanning imaging method and system based on spectrum orthogonal fluorescence

The invention discloses a super-resolution real-time event-triggered scanning imaging method and system based on spectrum orthogonal fluorescence, which utilizes a multi-component up-conversion nanoprobe to realize orthogonal fluorescence emission under excitation of different wavelengths, and is respectively used for event wide-field monitoring and super-resolution STED imaging. Compared with the prior art, the method has the advantages that the up-conversion dual-mode composite imaging technology capable of performing wide-field and spot scanning (super-resolution) imaging at the same time can overcome the defects that an event guidance system only works in a single imaging mode each time, the imaging modes need to be switched, and events cannot be continuously detected in a wide field; the problem that large-view information is lost due to mode switching is solved.
Owner:SOUTH CHINA NORMAL UNIV

Method for precisely compensating three-dimensional residual magnetism of single-beam SERF atomic magnetometer

The application discloses a method for precisely compensating three-dimensional residual magnetism of a single-beam SERF atomic magnetometer, which is based on the principle of high-frequency magnetic field modulation and comprises the following steps: after rough compensation of three-dimensional residual magnetism of a single-beam SERF magnetometer based on a quasi-static magnetic field, performing precise compensation of three-dimensional residual magnetism, wherein the precise compensation of three-dimensional residual magnetism comprises the following steps: applying a high-frequency modulation magnetic field, respectively scanning XYZ three-axis magnetic fields, and making the zero-crossing point of a dispersion curve corresponding to a demodulated first-order harmonic coincide with a zero-field point, so as to realize precise magnetic field compensation of a single-beam SERF magnetometer system. The method effectively improves the precision of magnetic compensation, solves the problems that a traditional magnetic compensation mode is not applicable to a single-beam SERF atomic magnetometer or the precision of magnetic field compensation in the direction of pumping light is too low, and is reasonable and simple to operate, thus playing a great promoting role in the development of atomic magnetometers.
Owner:BEIHANG UNIV

Method and system for determining field dependent aberrations

A method of determining field-dependent aberrations in an image field of an optical imaging system based on a measurement operation of determining aberration data for a plurality of field points in the image field, the method comprising the steps of:-defining a target grid comprising a plurality of target field points in the image field, where the target field points are the field points at which the aberration level is to be determined; defining a measurement grid comprising a first subset of the target field points, the first subset comprising all field points for which aberration levels are to be determined in a measurement operation; -measuring aberrations of all field points of the measurement grid to produce measured aberration data; defining an auxiliary grid comprising a second subset of the target field points, the second subset comprising selected target field points not included in the measurement grid, the aberration level of which is to be determined in an aberration data generation operation, wherein the aberration data generation operation is configured to generate aberration data for a target field point of the auxiliary grid based on (iii) knowledge of the optical imaging system, and (iv) potential system-specific aberration sources.
Owner:CARL ZEISS SMT GMBH +1

Control method and device, laser radar and terminal equipment

A control method and device, a laser radar and a terminal device are used for improving the accuracy of pulse detection in the field of pulse control. The method comprises the steps that a transmitting module is controlled to transmit a first pulse string and a second pulse string, the first pulse string comprises at least two first-type pulses and at least one second-type pulse, and the second pulse string comprises at least one first-type pulse and / or at least one second-type pulse, the power of the first-type pulse is greater than that of the second-type pulse. The high-power first-type pulse is adopted to detect the far-field target, and the low-power second-type pulse is adopted to detect the near-field target, so that the accuracy of far-field and near-field target detection can be effectively improved, and the point cloud quality of the laser radar is further improved. Moreover, the at least two first-type pulses are emitted in the first pulse string, and the at least two first-type pulses can be used for detecting the far-field target, thereby further improving the detection effect of the far-field target and the quality of the far-field point cloud.
Owner:YINWANG INTELLIGENT TECHNOLOGIES CO LTD

Parking site mining method and device and storage medium

The invention provides a parking site mining method and device and a storage medium, and relates to the field of logistics and computers. The stationing point mining method comprises the following steps: acquiring the geographic position of a mailing address of each non-stationing customer; constructing a sample point set by taking the geographic position of each mailing address of each non-resident customer as a sample point; clustering each sample point in the sample point set to obtain each sample point cluster; according to each sample point cluster, determining candidate standing points; and determining the standing point according to the candidate standing point. Therefore, the accuracy of standing point identification is improved.
Owner:BEIJING JINGDONG YUANSHENG TECH CO LTD

Short-focus projection design method and device suitable for curved surface target and storage medium

The invention relates to the technical field of projection, in particular to a short-focus projection design method and device suitable for a curved surface target and a storage medium. According to the method, a basic system is constructed through optical design, key coordinates are obtained through field point translation and ray tracing in combination with characteristics of a curved surface target, a mapping relation is accurately established by means of a radial basis function, and a pre-distortion image is generated. The method is advantaged in that adaptation to a curved surface target is realized, problems of distortion, non-uniform brightness and the like which are easy to occur in curved surface projection are effectively solved, clear images, no obvious deformation and no extra complex optical elements after projection are guaranteed, rapid deployment can be realized, and short-focus projection can stably output high-quality images on the curved surface.
Owner:FUTURE OPTICS (SHANGRAO) RES INST CO LTD +1

Method and device for determining wavefront aberrations caused by an optical system

The invention relates to a method and a device for determining wavefront aberrations caused by an optical system. Within the scope of a method according to the invention, in the optical system, an object field that is illuminated by way of an illumination system and situated in an object plane is imaged into an image field that is situated in an image plane by use of a projection lens, wherein, for at least one field point in the image plane, a plurality of measurements of the respective wavefront aberration generated at this field point are taken, with these measurements differing from one another in terms of the respective effective exit pupil of the beam path.
Owner:CARL ZEISS SMT GMBH

Anti-aliaising for optical inspection system

A wafer inspection tool including: an illumination system providing ultraviolet illumination light with wavelengths 2 below 300 nm and configured to direct light towards an object to be inspected; a detector array having a pixel pitch; one or more anti-aliasing (AA) elements; an objective having a numerical aperture (NA) and configured to collect light provided by the illumination system and returning from a plurality of field points on the object and to onwardly transmit a light beam formed from the returning light which has been collected towards the detector array via the one or more AA elements; a processor configured to: receive imaging requirements; control a NA of the objective; control, when the pixel pitch is larger than λ / (4*NA), position of the one or more anti-aliasing elements, based on the pixel pitch, the NA, and the imaging requirements.
Owner:APPL MATERIALS ISRAEL LTD

Coupling mirror of an optical inspection system

A wafer inspection tool comprising an illumination system having: a field of view (FOV); a light source pupil having a size and shape; a central optical axis; and one or more field angle defining a shape of said FOV extending away from said light source pupil; an objective lens arrangement including an objective and a plurality of interchangeable telescopes coupled thereto, the objective lens arrangement being configured to collect light reflected off a plurality of field points on the wafer and to onwardly transmit a light beam formed from the collected light; and a light separator having a first reflective surface with a transmissive region formed therein and a second surface, wherein said transmissive region is arranged to allow therethrough a central portion of said light beam transmitted from said objective lens arrangement corresponding to the brightfield channel while said reflective surface is arranged to reflect a peripheral portion of said light beam transmitted from said objective lens arrangement corresponding to the darkfield channel; a relay module configured to relay said light source pupil to said transmissive region; wherein said transmissive region has a shape defined as a geometric intersection volume between a model of said illumination light and said reflective surface and said second surface; wherein said model includes a plurality of solids each solid having a cross section of said light source pupil and angled to a field angle of said one or more field angle.
Owner:APPL MATERIALS ISRAEL LTD