The invention relates to a projection objective which consists of at least seven lenses that are adjacent to air on both sides. The inventive projection objective meets the criteria of the following equations in its totality: u>=12.8°; 100 mm<=LEP<=400 mm; sigmaRBa>=1°; sigmaRBi<=-14°, whereby u is the
aperture angle (2u-entire angle) on the illumination side; LEP is the distance from the
entrance pupil (on the illumination side) to the
object level (the position in the direction of projection from the reference point:
object level corresponds to a positive value); sigmaRBa is the angle inclination of the beam in relation to the
optical axis in the object space between the object and the 1. lens surface of the objective, said beam limiting the bundle for the field edge (outer
field point in the object) towards the outside (away from the
optical axis, far from the axis) and sigmaRBi is the angle inclination of the beam in relation to the
optical axis in the object space between the object and the 1. lens surface of the objective, said beam limiting the bundle for the field edge (outer
field point in the object) towards the inside (towards the optical axis, close to the axis). The angles sigmaRBa and sigmaRBi are positive when the corresponding beams intersect the optical axis in a point which is situated in the opposite direction of projection when seen from the object. Said angles are negative when the beams intersect the optical axis in a point which is situated in the direction of projection when seen from the object.