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35results about How to "Improve surface mobility" patented technology

Preparation method of RB-SiC (Reaction Bonded Silicon Carbide) substrate reflector surface modification layer

The invention provides a preparation method of an RB-SiC (Reaction Bonded Silicon Carbide) substrate reflector surface modification layer, and belongs to the technical field of thin film deposition. The method comprises the following steps: I, preparing filming conditions: mounting a Si target on a twin sputtering cathode of a filming machine, performing surface cleaning treatment on the RB-SiC substrate, fixing to a filming machine workpiece clamp, vacuuming the filming machine and roasting the RB-SiC substrate; II, performing surface treatment on the surface of the Si target of the sputtering cathode: introducing Ar gas into the sputtering cathode, and adjusting medium frequency power supply power to perform sputtering pre-treatment on the surface of the Si target; III, preparing the Si modification layer: increasing the medium frequency power supply power and Ar ventilation volume, and depositing the Si modification layer on the RB-SiC substrate by using a medium frequency magnetron sputtering technology. The preparation process is greatly simplified, the compactness of the film layer is high, the film is uniform, the polishing characteristic is obviously improved, and the optical quality of the surface of the polished substrate is greatly improved.
Owner:CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI

AlN epitaxial layer and preparation method thereof

ActiveCN107516630AImprove migration abilityWeak migration ability and improved crystallization qualitySemiconductor/solid-state device manufacturingDefect repairIsolation layer
An AlN epitaxial layer and preparation method thereof relate to the field of semiconductor epitaxy technology. According to the invention, an N polarity isolation layer grows at a comparatively low temperature, so that the N polarity is isolated well and single Al polarity is formed. Then a nucleating layer is formed on the N-polarity isolation layer at a medium temperature. The surface transfer ability of Al atoms at the medium temperature is improved and the quality of the nucleating layer is improved. The temperature is increased further and a defect repairing layer is settled on the nucleating layer at a comparatively high temperature, so that spot defect concentration can be reduced in a condition with stress release and dislocation annihilation. Finally, the temperature is increased continually and the high transfer ability of the Al atoms is kept at a high temperature, so that quick settlement on the basis of the defect repairing layer is realized and the growth efficiency is improved. The preparation method provided by the invention is simple in technique, convenient to operate and provides high growth efficiency. The AlN epitaxial layer prepared by adopting the preparation method has characteristics of smooth surface, single Al polarity and low dislocation annihilation.
Owner:GUANGDONG INST OF SEMICON IND TECH

Method for overcoming surface defect of polycrystalline silicon

The invention relates to the field of semiconductors, and particularly discloses a method for overcoming a surface defect of polycrystalline silicon. The method specifically comprises the steps that surface passivating treatment is conducted on the polycrystalline silicon through sulfur-containing passivating liquid or SCl2 gas, wherein the sulfur-containing passivating liquid is an ammonium sulfide solution or a sodium sulfide solution. According to the method for overcoming the surface defect of the polycrystalline silicon, due to the fact that surface passivating treatment is conducted on the polycrystalline silicon through the sulfur-containing passivating liquid or the SCl2 gas, the surface defect formed on the surface of the polycrystalline silicon in the polycrystalline silicon formation technological process can be effectively overcome, suspended chemical bonds can be effectively removed, the surface mobility of the polycrystalline silicon can be improved to a small extent, and the service life of the high mobility of the polycrystalline silicon can be prolonged. Compared with conventional hydrogen implantation and dehydrogenation technologies, the method has the advantages that operation is easier and more convenient, and the method can be accomplished only through the one-step technological process.
Owner:BOE TECH GRP CO LTD +1

LED epitaxial wafer, epitaxial growth method and LED chip

The invention provides an LED epitaxial wafer, an epitaxial growth method and an LED chip, the LED epitaxial wafer comprises a P-type layer, the P-type layer comprises an electron barrier layer, a transition layer and a contact layer, the transition layer comprises a first sub-layer, a second sub-layer and a third sub-layer, the second sub-layer and the third sub-layer are sequentially deposited on the first sub-layer, the first sub-layer is a P-Al1-xScxN layer, the second sub-layer is a GaN layer, and the third sub-layer is an N-Al1-yScyN layer. According to the invention, the first sub-layer and the third sub-layer respectively form a heterojunction interface with the second sub-layer, and piezoelectric polarization charge densities with opposite positive and negative polarities are generated at the heterojunction interface, so that a large number of unbalanced holes are injected into the first sub-layer, and then are injected into an active region to generate radiation recombination with electrons, thereby improving the photoelectric conversion efficiency. The situation that few holes are generated due to high acceptor activation energy of the P-type layer is relieved, and the problem that the light-emitting efficiency of the ultraviolet light-emitting diode is low is solved.
Owner:JIANGXI ZHAO CHI SEMICON CO LTD

GaN-based light-emitting diode epitaxial wafer, preparation method of GaN-based light-emitting diode epitaxial wafer, and light-emitting diode

The invention discloses a GaN-based light-emitting diode epitaxial wafer, a preparation method of the GaN-based light-emitting diode epitaxial wafer, and a light-emitting diode, and belongs to the technical field of epitaxy. The GaN-based light-emitting diode epitaxial wafer comprises a substrate, an AlN thin-film buffer layer, a three-dimensional nucleating layer, a two-dimensional buffer recovery layer and an epitaxial layer, wherein the AlN thin-film buffer layer, the three-dimensional nucleating layer, the two-dimensional buffer recovery layer and the epitaxial layer are sequentially stacked on the substrate; the three-dimensional nucleating layer is a GaN layer; the three-dimensional nucleating layer comprises a first nucleating sub-layer, a second nucleating sub-layer and a third nucleating sub-layer which are sequentially stacked on the AlN thin-film buffer layer; for the first nucleating sub-layer, the growth pressure of is 150-250 torr, the growth temperature is 1,000-1,100 DEG C, and the V/III ratio is 500-1,000; for the second nucleating sub-layer, the growth pressure is 500-700 torr, the growth temperature is 900-1,000 DEG C, and the V/III ratio is 100-200; and for thethird nucleating sub-layer, the growth pressure is 100-200 torr, the growth temperature is 1,100-1,150 DEG C, and the V/III ratio is 200-300. The interaction of dislocation is enhanced by growing thenucleating layer according to the three sub-layers, so that various dislocations caused by a pressure stress between the AlN thin-film buffer layer and GaN can be reduced, and the surface mobility ofAl atoms is improved.
Owner:HC SEMITEK ZHEJIANG CO LTD

Epitaxial wafer of light emitting diode and manufacturing method of epitaxial wafer of light emitting diode

The invention discloses an epitaxial wafer of a light emitting diode and a manufacturing method of the epitaxial wafer of the light emitting diode. The manufacturing method relates to a low-temperature buffer layer GaN, an undoped GaN layer, a Si-doped N-type GaN layer, a light emitting layer, a P-type GaN layer and a high-temperature P-type GaN layer, wherein the undoped GaN layer is located on the low-temperature buffer layer GaN, the Si-doped N-type GaN layer is located on the undoped GaN layer, the light emitting layer is located on the Si-doped N-type GaN layer, the P-type GaN layer is located on the light emitting layer, and the high-temperature P-type GaN layer is located on the P-type GaN layer. The light emitting layer comprises InGaN layers and GaN layers in a plurality of periods, and the InGaN layer in each period grows through time slicing. By means of the epitaxial wafer of the light emitting diode and the manufacturing method of the epitaxial wafer of the light emitting diode, InGaN of the light emitting layer grows in a subsection mode, the feature of the surface can be changed, the surface migration rate of In atoms is improved, and the light emitting rate of the light emitting diode is accordingly improved.
Owner:XIANGNENG HUALEI OPTOELECTRONICS

A three-dimensional plasmonic nanocomposite structure and its preparation method and application

The invention discloses a three-dimensional plasma nanocomposite structure and its preparation method and application. The structure comprises: an aluminum reflection layer, an aluminum oxide array bracket, and a gold nanometer antenna. The aluminum oxide array bracket is arranged on the aluminum reflection layer; the gold nano-antenna is arranged on the side surface of the aluminum oxide array bracket opposite to the aluminum reflection layer. In order to prevent the overflow of the incident light, the present invention introduces the aluminum reflective layer and the aluminum oxide array resonant cavity, and combines the advantages of the aluminum reflective layer with strong light interference effect, the aluminum oxide array resonant cavity and the self-assembled gold nano antenna with strong surface plasmon effect, through The coupling effect of the reflective layer, the aluminum oxide array support and the gold nano-antenna can effectively clamp the light wave on the surface of the nanocomposite structure, realize the repeated utilization of the incident light wave, effectively improve the light utilization rate of the light-sensitive layer, and break through the light of traditional light detection materials. Absorption rate limitation.
Owner:HUAZHONG UNIV OF SCI & TECH +1

Gan-based light-emitting diode epitaxial wafer and preparation method thereof, light-emitting diode

The invention discloses a GaN-based light-emitting diode epitaxial wafer, a preparation method thereof, and a light-emitting diode, belonging to the field of epitaxy technology. The GaN-based light-emitting diode epitaxial wafer includes a substrate, and an AlN thin film buffer layer, a three-dimensional nucleation layer, a two-dimensional buffer recovery layer and an epitaxial layer stacked on the substrate in sequence. The three-dimensional nucleation layer is a GaN layer; the three-dimensional nucleation layer includes The first nucleation sublayer, the second nucleation sublayer and the third nucleation sublayer stacked on the AlN film buffer layer in sequence; wherein, the growth pressure of the first nucleation sublayer is 150-250torr, and the growth temperature is 1000-1100°C, The V / III ratio is 500‑1000; the growth pressure of the second nucleation sublayer is 500‑700torr, the growth temperature is 900‑1000°C, and the V / III ratio is 100‑200; the growth pressure of the third nucleation sublayer is 100‑ 200torr, the growth temperature is 1100-1150℃, and the V / III ratio is 200-300. By growing the nucleation layer in three sublayers to enhance the interaction of dislocations, it can finally reduce various dislocations caused by the compressive stress between the AlN film buffer layer and GaN, and improve the surface mobility of Al atoms.
Owner:HC SEMITEK ZHEJIANG CO LTD
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