This invention discloses an
acetone sensor based on MOF-derived
oxygen-vacancy-rich α-Fe₂O₃ and its fabrication method. The aforementioned
acetone gas sensor has a planar structure, including an Al₂O₃
ceramic sheet, a pair of interdigitated gold electrodes printed on the upper surface of the Al₂O₃
ceramic sheet, a RuO₂
heating film printed on the lower surface of the Al₂O₃
ceramic sheet, a pair of strip-shaped gold electrodes printed on the surface of the RuO₂
heating film, a gas-sensitive film coated and fixed to the surface of the interdigitated gold electrodes,
platinum wire leads I, II, III, and IV. The gas-sensitive film uses an
oxygen-vacancy-rich α-Fe₂O₃ sensitive material. This invention can produce an
acetone sensor with excellent acetone sensitivity characteristics, enabling efficient detection of low concentrations of acetone. It overcomes the problems of insufficient sensitivity and
slow response speed of traditional gas sensors in acetone detection. Furthermore, the acetone sensor fabrication process is highly compatible with existing
microfabrication technologies, meeting the needs of industrial production.