The utility model relates to the technical field of
semiconductor manufacturing equipment, concretely is a kind of low-cost stainless steel
semiconductor heating disc structure, including cover, pedestal, electric heater and shaft column, the side of pedestal and cover connection is provided with annular groove, cover is embedded in annular groove, and cover and pedestal are connected by the
welding bead of outer circumferential annular and the
electron beam
welding connection of several
welding spots inside array.It is adopted that the low-cost stainless steel
semiconductor heating disc structure uses
electron beam welding, avoids the damage of high temperature to electric heater insulating medium, improves heating disc reliability and service life;At the same time,
electron beam welding cost is lower, can shorten
production cycle, improve production efficiency;Its unique welding structure, such as annular groove cooperation outer circumferential annular welding bead and inside array welding spot, strengthens the connection strength and overall stability;Reasonable welding spot distribution ensures heating uniformity, and the cylindrical protruding design at welding spot improves welding precision.