2results about How to "Avoid affecting subsequent processes" patented technology

The application relates to the field of semiconductor process equipment, in particular to a device for large-capacity liquid medicine storage of semiconductor equipment and a liquid medicine supply system. The device comprises a liquid storage tank provided with a liquid storage cavity, the upper portion of the liquid storage cavity is provided with a cleaning cavity in fluid communication with the liquid storage cavity; the internal volume of the cleaning cavity is smaller than that of the liquid storage cavity; a liquid inlet pipe is arranged to introduce liquid medicine into the liquid storage cavity of the liquid storage tank from the outside; a liquid outlet pipe is arranged at the bottom of the liquid storage cavity and connects the liquid storage cavity of the liquid storage tank to a liquid source; a waste pipe is arranged at the top of the cleaning cavity to discharge the liquid medicine bubbles in the cleaning cavity; and a vent pipe is arranged to connect the cleaning cavity of the liquid storage tank with the outside to keep the air pressure in the cleaning cavity of the liquid storage tank consistent with the ambient air pressure. The application improves the separation efficiency of large-capacity liquid medicine and gas, reduces the probability of generating bubbles in the liquid medicine, improves the uniformity of wafer surface coating, and can meet the high-integration equipment layout.

The utility model belongs to watchband manufacturing technical field, concretely is a watchband loading jig, including the bottom plate, the top left side fixedly connected with mounting panel of bottom plate, the top of mounting panel is provided with the material discharging plate, the top of material discharging plate is provided with a plurality of material discharging grooves, the utility model is in quick detach assembly, and the cooperation of plug -in rod and slot provides the material discharging plate with preliminary positioning, and the elastic reset of the joint cooperation spring no.