The present invention relates to the removal of a gas or of a gas mixture from a closed container.More particularly, the invention provides a method and apparatus particularly useful in the production of semiconductors, for automatically and economically purging a first gas or gas mixture from a closed container.The present invention achieves the above object by providing a method and an apparatus, particularly useful in the production of semiconductors, for automatically and economically purging a first gas or mixture from a closed container, said method having the following steps:step a: providing equipment includinga first sensor in fluid communication with the outlet of said container;a source of a second compressed gas suitable for purging said first gas;at least one remotely controllable
inlet valve disposed between said source of said compressed gas and the inlet of said container;a flow restrictor disposed in said outlet of said container;an
electronic controller connected to and able to receive data from said first sensor and able to control at least one said
inlet valve according to a predetermined program relating
valve opening to time and to data from said first sensor;step b: sending a
start signal, which optionally may be generated automatically, to said
electronic controller;step c: start releasing said second gas into said container, the flow rate being controlled by said
electronic controller;step d: measuring a parameter of interest by means of a first sensor at the outlet of said container and sending data relating to said parameter to said controller; andstep e: adjusting
inlet flow in relation to purging progress.