The application provides a kind of
space charge measurement electrically excited ellipsometric joint detection
system and method, the
high voltage pulse source of the excitation part generates electric pulse, disturbs the
space charge accumulated in the interior of insulating sample and excites elastic wave, the elastic wave is transmitted to the photoelastic sensor that is attached to the surface of polarization
electrode, causes the
refractive index change of sensor;Subsequently, the detection part adopts the ellipsometric measurement light path, is polarized after polaroid and is incident to photoelastic sensor, and the reflected light is decomposed into two orthogonal polarized lights by 1 / 4 wave plate and
Wollaston prism in turn, and the
light intensity difference is detected by balanced
detector difference, so that the elastic wave
signal is converted into electrical
signal output.The physical isolation of detection end and
high voltage loop is realized, and the breakdown risk of capacitive isolation is avoided;At the same time, since the detection
laser does not need to be in direct contact with the sample, the damage of the original
electric field distribution of the insulating sample by the full contact structure is eliminated, and the measurement result more truly reflects the original state of the internal
space charge of the insulating sample.