95results about How to "Avoid coupling effects" patented technology

The invention discloses a closed-loop driving circuit for a micromechanical resonance structure, which is an alternating-current automatic gain control closed-loop self-excited driving circuit mainly comprising an amplitude limiting circuit 7, a band-pass filter 8, an automatic gain control loop 9 and a phase compensating circuit 12. The automatic gain control loop 9 adjusts the gain of a loop and the phase compensating circuit 12 adjusts the phase of the loop so as to separate the gain adjustment and the phase adjustment, avoid the coupling influence between the gain adjustment and the phase adjustment and facilitate the debugging of the circuit; and the introduction of the amplitude limiting circuit 7 and the band-pass filter 8 enlarges the linear working range of the circuit, even if an I / V converter 5 detects high output signals, the signals are limited in a certain amplitude through the amplitude limiting circuit 7, and the noise signals are filtered through the band-pass filter 8 so that the feedback driving signals are limited at a resonance frequency and instable resonance caused by introducing nonlinear signals into the circuit is avoided.

The invention discloses a dynamic balance manipulator comprising a pedestal structure. The pedestal structure comprises a pedestal body and a first rotary mechanism. The first rotary mechanism is in transmission connection with a shoulder joint structure. The shoulder joint structure comprises a shoulder joint body and a first swinging mechanism in transmission with an upper arm structure. The upper arm structure comprises an upper arm body and a second swinging mechanism connected with the upper arm body fixedly and in transmission connection with a forearm structure. An elbow joint structure comprises an elbow joint body, a second rotary mechanism and a third swinging mechanism. The second rotary mechanism and the third swinging mechanism are in transmission connection with a wrist joint structure. The wrist joint structure comprises a wrist joint body and a third rotary mechanism in transmission connection with a clamping hand structure. The invention provides a dynamic balance manipulator making the manipulator system reach dynamic balance.

The invention belongs to the field of environment simulation and control, and relates to a dynamic aviation thermal power testing system and a rapid temperature and pressure control method which are mainly used for the airplane environment control system ground simulation test and are capable of achieving rapid temperature, pressure and flow adjustment and carrying out rapid temperature increasing and reducing and pressure increasing and reducing of an environment control system and the full-flight envelope dynamic simulation test. According to the dynamic aviation thermal power testing system, the project achieving difficulty of a heater is lowered through an indirect heating mode, and the possible problem of dried burning due to direct heating can be avoided. The temperature and pressure are independently controlled, and the temperature and pressure coupling effect is eliminated. A rapid adjusting mechanism is arranged in front of a heat exchanger, the project achieving difficulty of the adjusting mechanism is lowered, accordingly, the reliability of the system is improved, and the manufacturing cost of the system is reduced. The system is further provided with a heat regenerator, part of waste heat can be recycled, the system efficiency is improved, and the consumed energy of the system is reduced.

The invention provides a fiber optic gyroscope eight-position calibration method based on a rotating mechanism. The method comprises the following steps of: fastening fiber optic gyroscope components on the table surface of an indexing mechanism, leveling the table surface and side of the indexing mechanism, and ensuring that a gyroscope coordinate system is superposed with an indexing mechanism coordinate system; determining initial position parameters of a carrier through a GPS (global positioning system), and loading the parameters into a navigation computer; preheating by a strapdown inertial navigation system, and acquiring data output by the fiber optic gyroscope and a quartz accelerometer and processing the data; determining a carrier horizontal attitude angle by using the gravity acceleration component of the accelerometer; establishing a fiber optic gyroscope brief error model; designing an eight-position indexing scheme by using the dual-shaft indexing mechanism; and processing the output data of the gyroscope components on each position acquired by a computer through Matlab software, so as to obtain each error parameter of the gyroscope components. By the eight-position calibration method using the indexing mechanism, each error parameter of the fiber optic gyroscope can be exactly calculated; and short-time and high-precision calibration work to the fiber optic gyroscope can be finished under the condition that the carrier attitude is unknown.

The invention discloses an internal force measuring sensor. X, y and z axes are set by taking the center of a mounting bedplate as an original point, the internal force measuring sensor comprises a substrate, the mounting bedplate, two groups of plane dynamometry structures, vertical dynamometry structures of at least four vertical dynamometry links, and a plurality of connecting pieces, wherein the mounting bedplate is arranged above the substrate, one group of plane dynamometry structures are positioned at any one of two sides where the substrate is perpendicular to the xoz plane, the other group of plane dynamometry structures are positioned at any one of two sides where the substrate is perpendicular to the yoz plane, one ends of the two groups of plane dynamometry structures are fixedly arranged on the substrate, the other ends of the two groups of plane dynamometry structures are connected with the mounting bedplate by the connecting pieces positioned on the side wall of the mounting bedplate, the vertical dynamometry links are provided with a plurality of strain sheets, and two ends of the strain sheets are connected with the substrate and the mounting bedplate by the connecting pieces. The substrate of the internal force measuring sensor is connected with a foundation, the mounting bedplate and an upper structure are connected, the internal force from the section of a cylinder bottom is transmitted to the sensor through the mounting bedplate, the force transmission path is clear, thus providing a basis for the comparison of nonlinear analysis of the structure on the internal force level.

The invention discloses an intelligent heat exchange station. The intelligent heat exchange station comprises a monitoring center, a control unit and a heat supply network second-level heat exchange station, wherein a plurality of adjusting monitoring devices are arranged in connecting pipelines of the heat supply network second-level heat exchange station, the adjusting monitoring devices are connected with the control unit, and the control unit collects data of the adjusting monitoring devices in the heat supply network second-level heat exchange station, carries out processing on the data, sends the data to the monitoring center in a wired or wireless mode, and carries out cooperation monitoring with the monitoring center or independent monitoring. According to the intelligent heat exchange station, a large number of physical quantities are monitored and are collected in real time through the control unit and the monitoring center, real-time collection and processing are carried out on parameters through a PLC, the running state and the running quality of a heat supply system can be mastered in a macroscopic mode, operating parameters of the heat supply system can be ensured, full-automatic adjustment is carried out on water power working conditions and heating power working conditions of a heat supply network, influence of coupling of heat exchange stations is eliminated, water supply imbalance of the heat supply network is eliminated, and the heat supply effect is balanced.

The invention discloses a flight parameter measurement system for a small-size bypass aircraft, which can achieve the purpose of enhancing the measurement convenience and the accuracy of measured data. The flight parameter measurement system for the small-size bypass aircraft comprises a test platform seat, a linear guide rail, a torque sensor, a universal joint coupler, five stretch-press measuring devices, the small-size bypass aircraft, a work table, two knuckle bearings, a hinge, a sliding bearing, an optical axis supporting seat, two axial spacing rings, a fixed axis, an optical axis and three steel poles. In the invention, a sensor is orthogonally arranged according to a coordinate system of a machine body, the torque sensor is arranged along the axis direction of the horizontal machine body, a stretch-press sensor is arranged by adopting the knuckle bearing and the hinge, the torque sensor is connected with the small-size bypass aircraft through the universal joint coupler, and the stretch-press sensor is connected with the small-size bypass aircraft through the knuckle bearing, and therefore, the measurement of the quality, the mass center position, the engine thrust, the pitching moment, the rolling moment and the yawing moment of the small-size bypass aircraft is realized.

The invention provides a spot calibration method of a rotary strap-down inertial navigation system with unknown carrier attitude. The spot calibration method comprises steps as follows: fastening a fiber-optic gyroscope on a table surface of a dual-shaft indexing mechanism, so that a coordinate system of the gyroscope is ensured to be overlapped with a coordinate system of the indexing mechanism; determining an initial position parameter of the carrier through a GPS (global positioning system) and binding the initial position parameter of the carrier in a computer; collecting data output by the fiber-optic gyroscope and a quartz accelerometer and processing the data; determining horizontal attitude angle of the carrier by utilizing gravity sensing component of the accelerometer; establishing a simple error model of the fiber-optic gyroscope; designing an eight-position indexing scheme by using the dual-shaft indexing mechanism; and processing output at each position of gyroscope module collected by the computer through Matlab to obtain various error parameters of the gyroscope module. A eight-position static calibration method provided by the dual-shaft indexing mechanism disclosed by the invention can be applied to calculating each error coefficient of the fiber-optic gyroscope accurately, thereby short-time and high-precision calibration work of the fiber-optic gyroscope under a condition that the carrier attitude is unknown are accomplished.

Two on-chip capacitors including one HV capacitor VPPcap and one LV VCC capacitor VCCcap are built over a NVSRAM memory chip as a back-up second power supplies for each NVSRAM cell, regardless of 1-poly, 2-poly, PMOS or NMOS flash cell structures therein. The on-chip HV and LV capacitors are preferably made from one or more MIM or MIP layers for achieving required capacitance. A simplified VCC power system circuit without a need of a State machine designed for performing only one NVSRAM Program operation without Erase operations is proposed for initiating NVSRAM's Auto-Store operation without using any off-chip Vbat and Vcap. During the Auto-Store operation, all HV pumps and oscillators associated with the two on-chip capacitors are shut off once VCC voltage drop is detected by a VCC detector to be below 80% of regular VDD level.

A liquid crystal display (LCD) panel and pixel array substrate thereof is related to the pixel array substrate including a first substrate, gate lines, data lines, thin film transistors, a first insulation layer, a transparent conductive layer, a second insulation layer, contact holes, and pixel electrodes. The gate lines, the data lines, and the thin film transistors are disposed on the first substrate, and the first insulation layer covers thereon. The transparent conductive layer is disposed on the first insulation layer and has a common voltage level. The second insulation layer is disposed between the transparent conductive layer and the pixel electrodes, and insulates the transparent conductive layer from the pixel electrodes. The pixel electrodes are coupled electrically to third terminals of the corresponding thin film transistors through the corresponding contact holes.

The invention discloses a dual-frequency high-isolation mobile phone MIMO antenna based on mode orthogonality. The dual-frequency high-isolation mobile phone MIMO antenna comprises a dielectric substrate, two dielectric plates, a first antenna module and a second antenna module, wherein the antenna module is composed of a radiation unit and a decoupling structure, the metal floor is printed on theback of the dielectric substrate; the radiation unit is composed of two radiation branches printed on the two sides of the metal floor, and the inner side faces of the two dielectric plates are printed; the decoupling structure is composed of two branches, and the coupling degree of two resonance points is reduced. According to the structure of the antenna provided by the invention, dual frequency bands are realized through different resonance branches of the antenna, the dual frequency bands cover 3.4 GHz-3.5 GHz of a telecommunication 5G frequency band, 3.5 GHz-3.6 GHz of a Unicom 5G frequency band and 4.8 GHz-4.9 GHz of a mobile 5G frequency band, and a problem of covering 5G signals of three major domestic operators is well solved; the application of a mode orthogonal decoupling modein double frequencies is verified.

A high gain omni-directional antenna includes a substrate, a signal feed-in portion, a first radiating unit, and a second radiating unit. The first radiating unit and second radiating unit respectively have a first radiation contact and a second radiation contact, for connecting the first radiating unit and the second radiating unit in series so as to form a circular closed loop. The high gain omni-directional antenna avoids the coupling effect between the signal line and the radiating end of the conventional high gain omni-directional antenna, and further solves the problem of excessively high directivity caused by the distance between the signal line and the radiating end. The design of the ring antenna of the high gain omni-directional antenna can raise the impedance and also realize a broader bandwidth.

The invention relates to a three-degree-of-freedom precision-positioning workbench, comprising the workbench and an enlarged base, wherein, the workbench and the enlarged base are positioned through three cylindrical rods; and three groups of two-stage enlarging mechanisms are vertically intersected to form the enlarged base. The precision-positioning workbench can reach nanoscale positioning precision, has good operability, effectively overcomes the problem of input and output coupling among the three groups of micrometric displacement enlarging mechanisms, and increases the operating flexibility.

The invention discloses an array substrate and a display panel. The array substrate comprises a substrate body and a plurality of pixel electrodes located on the substrate body and distributed in multiple rows and multiple columns. A data line extending along the column direction is arranged between any two adjacent columns of pixel electrodes; a first shielding common electrode extending along the column direction is arranged between each pixel electrode and the adjacent data line; the data line comprises a plurality of sub data lines which are electrically connected in sequence; the sub datalines are located between the substrate body and the pixel electrodes; the first shielding common electrode is located between the sub-data lines and the pixel electrode and is insulated from the sub-data lines and the pixel electrode. According to the invention, the electric field shielding effect of the first shielding common electrode can be effectively improved, so that the Xtalk crosstalk risk is effectively reduced.

The invention discloses a pressure distribution measurement and analysis system based on a flexible material. The pressure distribution measurement and analysis system comprises a flexible pressure-sensitive sensing array, a row multiplexing circuit, a voltage mirror scanning circuit, a signal amplifying and conditioning circuit and a signal acquisition processing module, wherein the row multiplexing circuit is used for accessing a reference voltage to a driving end of each flexible pressure-sensitive sensing unit of a selected row; the voltage mirror scanning circuit is used for connecting the driving ends of the flexible pressure-sensitive sensing units of the selected row to high level, and connecting the rest rows to low level; the signal amplifying and conditioning circuit amplifies measured signals of the flexible pressure-sensitive sensing units of the selected row, and outputs the amplified signals to the signal acquisition processing module; and the signal acquisition processing module receives output signals of the signal amplifying and conditioning circuit, converts the signals into a pressure measurement result, and transmits the pressure measurement result to a displaymodule for displaying the pressure measurement result. The invention further discloses a pressure distribution measurement and analysis method based on the flexible material. The pressure distribution measurement and analysis system and the pressure distribution measurement and analysis method can be applied to a plurality of occasions where the pressure needs to be measured, effectively solve the coupling problem between the sensing units of the sensor, visually display the measured data, and facilitate control.

The invention discloses a traction converter circuit. The traction converter circuit comprises an auxiliary conversion loop and multiple completely independent main conversion loops; each main conversion loop comprises a pre-charging module, a four-quadrant rectification module, an intermediate direct-current loop and an inversion module which are connected in sequence, wherein the pre-charging module is used for performing on-off control on the pre-charging process and normal working process of the traction converter circuit, the four-quadrant rectification module sets input alternating current into direct current and inputs the direct current into the intermediate direct-current loop, and the intermediate direct-current loop comprises a support capacitor for voltage stabilization; and the auxiliary conversion loop comprises a multi-station isolation switch and an auxiliary inversion module which are connected with each other, wherein the multi-station isolation switch is in switchingconnection with the intermediate direct-current loop of any main current conversion loop so as to take electricity for the auxiliary inversion module. According to the traction converter, a full-independent shaft control type and main and auxiliary integrated structure is adopted, the usability and reliability of the traction converter are effectively improved, and the size and weight of equipment are reduced.

An optical waveguide chip coupling testing clamp comprises a chip supporting bench and a supporting structure used for supporting the chip supporting bench. The chip supporting bench is provided with a chip clamp. The chip clamp comprises a plurality of chip fixing adjusting knobs and chip fixing clamps respectively fixed to each chip fixing adjusting knob. The plurality of chip fixing clamps are arranged in such a manner that a chip to be fixed is surrounded to the central region, and the chip fixing adjusting knobs are capable of adjusting fixing positions and fixing angles of the chip fixing clamps relative to the chip. The optical waveguide chip coupling testing clamp can be used for clamping and fixing the optical waveguide chip and adjusting the chip fixing angle when end surface coupling is carried out on an optical fiber and an optical waveguide, is suitable for the optical waveguide chips various in shape and size, and has the advantages that the structure is simple and novel, the chip is stably and firmly clamped, the attitude of the chip is flexibly adjusted, the clamped chip is easy to mount, dismount and replace, the operation is easy and convenient, the application range is wide, etc.

The present invention relates to a resistance variable memory device, and more particularly, to a resistance variable memory device capable of preventing an effect of coupling noise. The resistance variable memory device includes: a memory cell connected to a bit line; a precharge circuit precharging the bit line in response to a precharge signal; a bias circuit providing a bias voltage to the bit line in response to,a bias signal; and a control logic controlling the precharge signal and the bias signal. The control logic provides the bias signal to the bias circuit at a precharge interval. Accordingly, the resistance variable memory device according to the present invention can prevent an effect coupling noise.

A plurality of active areas are defined on a semiconductor substrate. Then at least one gate is formed on the semiconductor substrate to cover a portion of the active area. Thereafter a plurality of source / drain are formed in the active area not covered by the gate followed by forming a first dielectric layer on the semiconductor substrate to cover the gate and the source / drain. After that, at least one pixel cap top plate is formed atop the first dielectric layer and a capacitor dielectric layer is formed atop the surface of the top plate. Finally, at least one pixel cap bottom plate is formed atop the first dielectric layer to cover the top plate.

The invention discloses a cable fault point positioning device and a data processing method thereof. The cable fault point positioning device includes a steep wave pulse transmitting / receiving module, and the steep wave pulse transmitting / receiving module is connected with a test cable clamp, connected with one end of a faulted cable, through a cable clamp plug; the steep wave pulse transmitting / receiving module sends pulses to the faulted cable, and is connected with a CUP through an AD conversion module; the steep wave pulse transmitting / receiving module is communicated with a damping module, and the damping module eliminates multiple-reflected pulse energy inside the cable after a first pulse reflection wave is recorded; a power supply module provides power for the device. The cable fault point positioning device and the data processing method thereof can determine the fault type and fault position of the cable, and the working performance is excellent.

The present invention provides a rotor fulcrum load identification experimental device and method based on a retainer spring squirrel cage strain. The device comprises a squirrel cage test device, fulcrums, a turntable shaft, a coupler, a drive motor, a base, and an axial pretensioning device. The load identification method comprises the following steps of: sensitivity analysis of a squirrel cageunder combined load conditions; arrangement of a squirrel cage test device sensor; force parameter static calibration; and force parameter dynamic identification. The rotor fulcrum load identificationexperimental device and method achieve the composite load test and identification of the radial and axial loads of the retainer spring-rotor system fulcrum, employ a decoupling decomposition method to avoid radial and axial load coupling influences, and the identification test result is more accurate; the test device is simple in structure to simulate the experiments in complex working conditionssuch as the bearing pretensioning state, the unbalance rotor, the blade axial push load and fulcrum misalignment so as to provide technical support for the gas turbine engine rotor system fulcrum load change research in the complex working conditions.

The invention discloses a parallel binocular camera calibration method based on three-dimensional reconstruction, and the method comprises the steps: carrying out the multi-azimuth and multi-angle photographing of a calibration plate through a binocular camera, and obtaining a plurality of groups of left and right images of the calibration plate; obtaining camera initial parameters by using a Zhang Zhengyou calibration method; introducing a centroid increment formula, eliminating the influence of a coupling effect between a rotation matrix and a translation vector in a parameter updating process, constructing a cost function, and avoiding an overfitting phenomenon in a rotation matrix calculation process by utilizing least square method regularization; constructing a cost function betweenthe theoretical three-dimensional coordinates of the feature points and the true values of the corresponding feature points in a world coordinate system, and meanwhile, utilizing epipolar constraint and epipolar distance constraint to improve the convergence of the cost function and improve the accuracy of updating camera parameters.

The invention discloses a data processing method for realizing machine tool robustness thermal error compensation of wide-range environment temperature. The data processing method comprises the steps that 1. a modeling temperature independent variable Xk is extracted; 2. standardized processing is performed on the Xk, and an expression of a main component Zk is obtained through standardized temperature independent variable Xk* conversion; 3. previous p main components are extracted for participating in modeling; 4. standardized processing is performed on spindle thermal deformation quantity Sj, and standardized thermal deformation quantity Sj* and a multivariate linear regression equation between the previous p main components are established; 5. the Sj* and the regression equation between the previous p main components are converted into an equation of the Sj* and the Xk*; and 6. the regression equation of the Sj* and the Xk* is converted into an equation of the Sj and the Xk, and a thermal error compensation model is established; and the prediction performance of the thermal error model is further analyzed. Influence of coupling performance between the temperature independent variables on distortion of a model independent variable estimation value can be suppressed so that the data processing method has high prediction precision and prediction robustness.

The invention discloses a touch display substrate, a touch display device and a touch display method, and relates to the technical field of display touch. The touch display substrate, the touch display device and the touch display method aim at solving the problem that an electric signal on a transparent conductive electrode is likely to be pulled by an electric signal on an edge line, and consequently the touch performance stability is influenced. The touch display substrate comprises an underlayer, a thin film transistor array layer, a first transparent conductive electrode and a second transparent conductive electrode, and the thin film transistor array layer, the first transparent conductive electrode and the second transparent conductive electrode are arranged on the underlayer in sequence. In a display time period, the second transparent conductive electrode serves as a common electrode, in a touch time period, the second transparent conductive electrode is reused as a touch electrode, and the edge line is arranged in a non-touch area of the touch display substrate. The touch display substrate further comprises a shielding layer covering at least part of the edge line. The touch display substrate is used for achieving a touch function and a display function.

The invention discloses a novel damping and cushioning integrating device. The novel damping and cushioning integrating device comprises a cylinder with the variable cross-section, a first piston arranged in the cylinder, a first piston rod connected to the first piston, a second piston rod connected to the first piston, a second piston arranged at the end of the second piston rod, and an upper end cover and a lower end cover arranged at the end of the cylinder, the cylinder comprises a damping section and a buffering section, and a gap is kept between the first piston and the inner wall of the cylinder; and the second piston is arranged in the buffering section, the second piston can move in the axial direction of the cylinder, and the buffering section is filled with ferromagnetic particle small balls. According to the technical scheme of the novel damping and cushioning integrating device, the performance of a magnetorheological damper is used, a variety of external working conditions can be adapted, and the high damping performance is achieved; and during buffering, the particle damper performance is used, the output force value is stable, a magnetic field is changed by adjusting the coil current, the friction coefficient of the second piston and particles is adjusted, a variety of buffering conditions can be adapted, and the novel damping and cushioning integrating deviceis compact in structure and simple in mounting form.

The invention provides a display panel which comprises an active region, one or more multiplexers and a circuit region, wherein the one or more multiplexers are arranged on the periphery of the active region; a plurality of control wires and a plurality of signal wires are arranged in a circuit region; the control wires are coupled to the multiplexers; the signal wires are coupled to the multiplexers and the active region; and the control wires and the signal wires are in a non-intersected layout. According to the display panel provided by the invention, due to the adoption of the multiplexers, the amount of the required wires is reduced; in addition, a wire layout provided by the invention is adopted, so that the wires are not intersected and further load increase caused by unnecessary wire intersection can be avoided; and a coupling effect between the control wires and the signal wires can be avoided and further the competitiveness of the display panel can be increased.

Two on-chip capacitors including one HV capacitor VPPcap and one LV VCC capacitor VCCcap are built over a NVSRAM memory chip as a back-up second power supplies for each NVSRAM cell, regardless of 1-poly, 2-poly, PMOS or NMOS flash cell structures therein. The on-chip HV and LV capacitors are preferably made from one or more MIM or MIP layers for achieving required capacitance. A simplified VCC power system circuit without a need of a State machine designed for performing only one NVSRAM Program operation without Erase operations is proposed for initiating NVSRAM's Auto-Store operation without using any off-chip Vbat and Vcap. During the Auto-Store operation, all HV pumps and oscillators associated with the two on-chip capacitors are shut off once VCC voltage drop is detected by a VCC detector to be below 80% of regular VDD level.

The invention discloses a method for determining a gear shifting curve of a two-gear box pure electric bus based on hardware-in-loop simulation. The method comprises the following steps: performing calculating according to a wheel radius, a main reduction ratio, motor peak power and peak torque to obtain a preliminarily determined dynamic upshift point; decreasing the preliminarily determined power upshift point and the vehicle speed corresponding to the highest rotating speed of the motor at the first gear, and obtaining a finally determined power upshift point; setting the offset for the dynamic upshift point, obtaining an economical upshift point, and obtaining a complete upshift curve; shifting the upshift curve towards the negative direction of the x axis to obtain a downshift curve;and performing a standard cyclic working condition simulation test on different sums on a hardware-in-loop rack to obtain a sum value corresponding to the optimal economy. According to the method, thecalibration of the upshift and downshift curves is simplified, the calibration of different values is carried out on the two parameters of the economical upshift offset and the economical downshift offset, the hardware-in-loop simulation testing of the standard cyclic working condition is carried out, the parameter value with the optimal economical efficiency is selected, and no software change needs to be carried out on the vehicle control unit in the whole process.

The invention relates to a fabricating method of a non-volatile memory. The method comprises the following steps: a substrate is provided firstly, and the substrate is provided with a source electrode line region. Secondly, a tunneling dielectric layer, a first conductor layer, an inter-gate dielectric layer and a second conductor layer are formed on the substrate in sequence. Thirdly, the second conductor layer and the inter-gate dielectric layer which are in the source electrode line region are removed, to ensure the first conductor layer to be exposed out. Fourthly, openings are formed in the first conductor layer which is in the source electrode line region and the tunneling dielectric layer. Fifthly, a third conductor layer is formed on the substrate, and the third conductor layers are filled into openings. Sixthly, the patterned process is performed, the third conductor layer , the second conductor layer, the inter-gate dielectric layer and the first conductor layer are all patterned, so as to form a plurality of stacked gate structures, and simultaneously a source electrode line is formed in the source electrode line region. Finally, doped regions are formed at the both sides of the stacked gate structures and in the substrate below the source electrode line.