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84results about How to "Reduce channeling" patented technology

System and method for the manufacture of semiconductor devices by the implantation of carbon clusters

A process is disclosed which incorporates implantation of a carbon cluster into a substrate to improve the characteristics of transistor junctions when the substrates are doped with Boron and Phosphorous in the manufacturing of PMOS transistor structures in integrated circuits. There are two processes which result from this novel approach: (1) diffusion control for USJ formation; and (2) high dose carbon implantation for stress engineering. Diffusion control for USJ formation is demonstrated in conjunction with a boron or shallow boron cluster implant of the source / drain structures in PMOS. More particularly, first, a cluster carbon ion, such as C16Hx+, is implanted into the source / drain region at approximately the same dose as the subsequent boron implant; followed by a shallow boron, boron cluster, phosphorous or phosphorous cluster ion implant to form the source / drain extensions, preferably using a borohydride cluster, such as B18Hx+ or B10Hx+. Upon subsequent annealing and activation, the boron diffusion is reduced, due to the gettering of interstitial defects by the carbon atoms.
Owner:SEMEQUIP

Novel barrier type air-actuated three-phase fluidization synthetized absorbing tower

InactiveCN101081348ANot easy to cause blockageTo achieve the purpose of purification and absorptionDispersed particle separationInlet channelGrating
The grating type pneumatic triphase fluidizing comprehensive absorption tower includes one housing, one gas inlet channel and gas outlet channel in the top of the tower, one rotary defogging and dewatering unit, one stuffing assembly comprising support boards, hold-down boards and stuffing, one coaxial tubular grating member, one liquid distributor with ring sprinkler pipe, one large caliber reverse sprayer inside the gas inlet channel, and one absorbing slurry pond in the bottom of the tower. It features the special grating structure, the regularly arranged stuffing for cyclic fluidizing, the combined foam absorption and stuffing absorption, etc, and has high absorption efficiency, great gas treating amount and other advantages.
Owner:BEIJING HUAYU RONGTONG POWER TECH DEV

Light source and projector

A light source device (40) attached to an optical equipment provided with a light-source cooling fan (3) has a light source (401), a reflector (402), a light-transmissive component (51) that closes the light-irradiation side of the reflector (402) and a light source housing (50) that houses the above components. An opening (402A) for introducing a cooling air is formed on the reflector (402) and an opening (52) is formed on the light source housing (50) at a position corresponding to the light source housing (50). A duct (53) of which light-irradiation side is opened is provided on the opening (52). When the light source device (40) is attached to the optical equipment, the duct (53) protrudes toward the light-irradiation side to be connected with the fan (3). The opening (52) is opened in accordance therewith, so that the air from the fan (3) is introduced into the reflector (402).
Owner:SEIKO EPSON CORP

System and method for the manufacture of semiconductor devices by the implantation of carbon clusters

A process is disclosed which incorporates implantation of a carbon cluster into a substrate to improve the characteristics of transistor junctions when the substrates are doped with Boron and Phosphorous in the manufacturing of PMOS transistor structures in integrated circuits. There are two processes which result from this novel approach: (1) diffusion control for USJ formation; and (2) high dose carbon implantation for stress engineering. Diffusion control for USJ formation is demonstrated in conjunction with a boron or shallow boron cluster implant of the source / drain structures in PMOS. More particularly, first, a cluster carbon ion, such as C16Hx+, is implanted into the source / drain region at approximately the same dose as the subsequent boron implant; followed by a shallow boron, boron cluster, phosphorous or phosphorous cluster ion implant to form the source / drain extensions, preferably using a borohydride cluster, such as B18Hx+ or B10Hx+. Upon subsequent annealing and activation, the boron diffusion is reduced, due to the gettering of interstitial defects by the carbon atoms.
Owner:SEMEQUIP

Chromatography cartridge and method for manufacturing a chromatography cartridge

A chromatography cartridge and method of manufacturing same. A chromatography cartridge of the present invention can include a tubular housing having an open end and an inner surface, and a plug. The plug can be positioned within the open end of the tubular housing and can have an outer circumferential surface, a substantial portion of the outer circumferential surface being fused to the inner surface of the tubular housing. A method for manufacturing a chromatography cartridge can include coupling at least a portion of the outer surface of the plug to at least a portion of the inner surface of the tubular housing in response to rotating at least one of the plug and the tubular housing about the longitudinal axis with respect to the other of the plug and the tubular housing.
Owner:AGILENT TECH INC

Fluidized bed reactor used for light olefin cracking and Methanol To Olefin (MTO)

The invention discloses a fluidized bed reactor used for light olefin cracking and Methanol To Olefin (MTO), which comprises a reactor and a pre-riser; the reactor comprises a dense phase fluidized bed reactor and a dilute phase conveying reactor which are positioned at same axis, the pre-riser and the dilute phase conveying reactor are respectively positioned at upper part and lower part of the dense phase fluidized bed reactor; diameter of the pre-riser is smaller than diameter of the dense phase fluidized bed reactor, the upper part of the pre-riser extends into the dense phase fluidized bed reactor; an upper end port of the pre-riser in the dense phase fluidized bed reactor is sealed, and a perforate is provided on the tube wall of the pre-riser in the dense phase fluidized bed reactor; or the perforate is provided on the upper end of the pre-riser in the dense phase fluidized bed reactor, and a baffle plate is arranged over the perforate. The reactor is capable of increasing gas-solid contact efficiency, the backmixing degree of oil gas and a catalyst is less, and conversion rate of one way of the light olefin cracking and Methanol To Olefin (MTO) reactions can be greatly improved, and the target product micromolecule olefin selectivity can be greatly improved.
Owner:CHINA UNIV OF PETROLEUM (EAST CHINA)

System and method for the manufacture of semiconductor devices by the implantation of carbon clusters

A process is disclosed which incorporates implantation of a carbon cluster into a substrate to improve the characteristics of transistor junctions when the substrates are doped with Boron and Phosphorous in the manufacturing of PMOS transistor structures in integrated circuits. There are two processes which result from this novel approach: (1) diffusion control for USJ formation; and (2) high dose carbon implantation for stress engineering. Diffusion control for USJ formation is demonstrated in conjunction with a boron or shallow boron cluster implant of the source / drain structures in PMOS. More particularly, first, a cluster carbon ion, such as C16Hx+, is implanted into the source / drain region at approximately the same dose as the subsequent boron implant; followed by a shallow boron, boron cluster, phosphorous or phosphorous cluster ion implant to form the source / drain extensions, preferably using a borohydride cluster, such as B18Hx+ or B10Hx+. Upon subsequent annealing and activation, the boron diffusion is reduced, due to the gettering of interstitial defects by the carbon atoms.
Owner:SEMEQUIP

Deep learning beam domain channel estimation method based on approximate message passing algorithm

The invention provides a deep learning beam domain channel estimation method based on an approximate message passing algorithm. The deep learning beam domain channel estimation method is mainly applied to a millimeter wave large-scale MIMO system based on a lens antenna. The deep learning beam domain channel estimation method comprises the following steps: (1) constructing a deep network structurewhich is mainly composed of two parts, wherein one part is a model-driven deep network LAMP based on an approximate message passing algorithm, and the other part is a data-driven deep network ResNetbased on residual learning; (2) modeling a beam domain channel according to the geometric structure of the lens antenna, and generating training data according to a system model; (3) training data with different signal-to-noise ratios are used to carry out offline training on the network; and (4) fixing the optimized network parameters, and performing real-time beam domain channel estimation by using the trained network according to the received signal of the radio frequency link end. According to the invention, the precision of beam domain channel estimation can be effectively improved, and meanwhile, the calculation complexity similar to that of a traditional channel estimation algorithm is achieved.
Owner:ZHEJIANG UNIV

Bimetallic catalyst for degrading chlorine substitutional organic pollutant, preparation method and application

A bimetal catalyst for degradating the CCl4, trichlorothene and tetrachloroethene is sewage within one hour is composed of the modified zeolite as carrier and the bimetal Fe-Ni in the mass ratio of (1-10): 100. Said bimetal Fe-Ni is prepared by using sodium dithionite as reducer to reduce the Ni ions on the surfaces of Fe filings.
Owner:XINYI AGRI CHEM PLANT JIANGSU PROV

Horizontal-flow hydration apparatus

A novel apparatus is disclosed which comprises:(a) pumping means for injecting a fluid through a conduit means into an inlet pipe of a fluid mixing tank,(b) said fluid mixing tank comprising a plurality of compartments connected in series and in fluid communication with adjacent compartments in the series, and designed to provide for a horizontal flow of fluids from the first compartment to the last compartment in the series,(c) at least one compartment being equipped with one or more radial-flow impellers connected to a vertical shaft, and means for rotating such impellers at a rate designed to stir the contents of the compartment radially with high shear and prevent fluid stagnation,(d) at least one compartment being equipped with one or more axial flow impellers connected to a vertical shaft, and means for rotating such impellers at a rate designed to circulate the contents of the compartment vertically,(e) the inlet pipe being designed to introduce fluids into the first compartment, and(f) a means for withdrawing fluid from the apparatus through a discharge opening in the last compartment in the series.The new apparatus is particularly useful as a horizontal flow hydration tank to prepare aqueous viscous fluids for use as well treatment fluids. Hydratable polymers can be hydrated rapidly and consistently in real time. The apparatus is less complex mechanically and operationally than the compartmentalized vertical-flow tanks of the prior art, and it can be constructed as a mobile unit.
Owner:MCINTIRE WILLIAM RAY

Horizontal-flow hydration apparatus

A novel apparatus is disclosed which comprises:(a) pumping means for injecting a fluid through a conduit means into an inlet pipe of a fluid mixing tank,(b) said fluid mixing tank comprising a plurality of compartments connected in series and in fluid communication with adjacent compartments in the series, and designed to provide for a horizontal flow of fluids from the first compartment to the last compartment in the series,(c) at least one compartment being equipped with one or more radial-flow impellers connected to a vertical shaft, and means for rotating such impellers at a rate designed to stir the contents of the compartment radially with high shear and prevent fluid stagnation,(d) at least one compartment being equipped with one or more axial flow impellers connected to a vertical shaft, and means for rotating such impellers at a rate designed to circulate the contents of the compartment vertically,(e) the inlet pipe being designed to introduce fluids into the first compartment, and(f) a means for withdrawing fluid from the apparatus through a discharge opening in the last compartment in the series.The new apparatus is particularly useful as a horizontal flow hydration tank to prepare aqueous viscous fluids for use as well treatment fluids. Hydratable polymers can be hydrated rapidly and consistently in real time. The apparatus is less complex mechanically and operationally than the compartmentalized vertical-flow tanks of the prior art, and it can be constructed as a mobile unit.
Owner:MCINTIRE WILLIAM RAY

Heavy oil displacement method using wedged vicious slug

The invention relates to a heavy oil displacement method using a wedged vicious slug. The method includes the steps of 1, dividing a nonhomogeneous reservoir into a plurality of layers according to water absorbing capacities, and acquiring permeability Ki of each reservoir; 2, designing three slugs, namely a pre-slug, a main wedged slug and a trailed slug, according to the permeabilities Ki and the physical properties in heavy oil and reservoirs; 3, alternately injecting the heavy oil reservoir with the pre-slug which is prepared with low-concentration B III-type poly-surfactant and which enters a high permeability layer to emulsify crude oil; 4, injecting the reservoirs with the main wedged slug for multiple rounds; and 5, injecting the trailed slug with low-concentration B III-type poly-surfactant or fresh water generally. In each round, the main wedged slug is divided into three small slugs; the small slugs in each round are combined by regulating the corresponding concentrations by the B III-type poly-surfactant according to formation permeability. According to the method, the nonhomogeneous heavy oil reservoirs are emulsified to reduce viscosity, the wedged equivalent vicious slug is used for equi-fluidity displacement, and swept volume is increased; accordingly, recovery efficiency of heavy oil can be further increased, investment can be reduced and operation can be simplified.
Owner:DAQING DAHUA HONGYE PETROLEUM ENG TECH

Special hydrocracking catalyst and preparation method and application thereof

The invention relates to a special hydrocracking catalyst, and a preparation method and application thereof. According to the preparation method for the catalyst, a solution after-treatment method is adopted to ensure that metal is uniformly deposited on a carrier and does not migrate in the subsequent drying process, so that uniform dispersion of the metal is realized; and by the preparation method for the catalyst, the metal is uniformly dispersed, the carrier and the metal are well matched, and the catalytic performance is greatly improved. The hydrocracking catalyst is most suitable for the middle distillate type hydrocracking process.
Owner:CHINA PETROLEUM & CHEM CORP +1

Method for manufacturing PMOSFET

A method for manufacturing a PMOSFET uses a trench-type gate structure only in a PMOSFET region of a peripheral circuit, except for a cell, to overcome the shortcomings of a MOSFET caused by reduction in design rule, realize stable threshold voltage, and improve the characteristics and reliability of a PMOSFET transistor through reduction in channel dose.
Owner:SK HYNIX INC

Cellulose ethanol concentration by employing modified dimethyl polysiloxane polymer membrane

The invention discloses a cellulose ethanol technology which can use modified Polydimethylsiloxane polymer film to concentrate. Firstly, the raw material of wood cellulose can be smashed; and then hemicellulose can be eluted and hydrolyzed by diluted acid in a circulatory way. The obtained hydrolyzing sugar solution which mainly contains pentose can be fermented to produce ethanol. Solid residue left after the hydrolysis of the diluted acid can be mashed by a ball grinder to remove lignin, and then can be broken down by the cellulose. The obtained hydrolyzing sugar solution which mainly contains hexose can be fermented to produce ethanol. The ethanol fermentation liquid produced by fermenting pentose and hexose can be infiltrated and vaporized to concentrate ethanol after being filtered by an inorganic microfiltration membrane. The technology of the invention is simple and has low energy- consumption, low cost, but high yield; in addition, the invention has high selectivity to ethanol, and the operational conditions can be controlled easily. The after processing is easy without pollution.
Owner:CHINA PETROLEUM & CHEM CORP +1

Artificial wetland effluent collector

The artificial wetland effluent collector as one effluent collector for sewage treating artificial wetland includes two parts, a buffering gravel region and a water collecting groove. The buffering gravel region has a perforated water distributing wall for controlling water flow from the wetland and ensuring homogeneous distribution of the inflow, and a flute-shaped collecting pipe in the effluent side for collecting water. The flute-shaped collecting pipe comprises several flute-shaped pipes with valve and water collecting unit. The present invention can ensure the pseudo-parallel flow state of sewage in the wetland.
Owner:江苏东大科技园发展有限公司

Collaborative scheduling beam forming based user option method

The invention discloses a collaborative scheduling beam forming based user option method, and users are positioned in three cells, each with a base station at the middle part. The method comprises the following steps: step 10, initialization, setting a sequence of residual users in each cell, as well as a selected user set and a candidate user set ; step 20, selecting the first user in each cell; step 30, building the candidate user set in each cell; step 40, refreshing the candidate user set in each cell; step 50, selecting the 2Pth user, wherein the original value of the p is zero, and p represents the frequency of returning to the step 50 from the step 60; and step 60, if the absolute value of Sw is less than -1, returning to the step 50, and otherwise, terminating. Due to the adoption of the user option method, the performance of the cell edge users is improved; and moreover, the cell edge users are selected for transmission, so as to further improve the performance.
Owner:SOUTHEAST UNIV

Honeycomb nest hydrogenation protecting agent

A honeycomb nest hydrogenation protecting agent is prepared from 1-60% of alumina powder, 5-50% of kaolin, 0.1-15% of talcum powder, 5-60% of clay, 0.5-10% of an alkaline solvent, and 0.1-5% of an auxiliary material. The unit cross section area of the above product has more and denser through holes, so the external specific surface area of the product is greatly increased and reaches above 5000m<2> / m<3>, so a reaction raw material and the protecting agent have a larger contact and reaction area. The void fraction of the product reaches 30-70%, the water absorption rate reaches 10-50%, and the appropriate water absorption rate makes the protecting agent adsorb more active substances, so the absorption rate of adsorbed impurities is improved, and the catalysis effect is improved; and the radial crushing strength of the product is 50-500N / granule of the product, the product cannot be fragmented when 50-500N is applied to the two axial ends of the product, and maintains integrity, so the strength is improved, and the service life is prolonged.
Owner:JIANGXI ACICHEMSHUN IND

Control arrangment for a generator

Provided is a control arrangement for controlling an electrical machine, including: a fundamental current controller, at least one harmonic flux controller related to a harmonic of an electrical frequency of the electrical machine, a summation system for adding voltage commands to obtain a summed voltage command based on which the electrical machine.
Owner:SIEMENS GAMESA RENEWABLE ENERGY AS

Fruit tree sterilization coating agent prepared from swill-cooked dirty oil and preparation method thereof

InactiveCN103828814AStrong affinityStrong resistance to rain erosionBiocideFungicidesActive agentSalicylic acid
The invention discloses a fruit tree sterilization coating agent prepared from swill-cooked dirty oil and a preparation method of the coating agent. The coating agent specifically comprises the following components: 1-5% of active matters, 0.1-1% of salicylic acid, 0.05-0.1% of a growth regulating agent, 1-10% of a surfactant, 1-5% of an organic solvent, 0.1-1% of a stabilizing agent, 0.1-10% of biochemical fulvic acid, 0.1-1% of warning colouration and the balance of swill-cooked dirty oil. A composition, that is, the coating agent disclosed by the invention, is stable in property, is a coating agent for fruit tree rot, can prevent and treat bacterial or fungoid diseases such as fruit tree rot and canker and can eliminate fruit tree rot scab within a short period, new bark can grow, and the lasting period can be six months. A specific application method comprises the steps of directly coating the composition disclosed by the invention onto scab on trucks of fruit trees, or the composition can be diluted by swill-cooked dirty oil or other plant oil and is subsequently directly coated on the scab of fruit trees without scraping the scab with cutters, and meanwhile resource utilization of the swill-cooked dirty oil is achieved.
Owner:SHAANXI PUCHENG MEIERGUO AGROCHEM

Micropipette and dividedly injectable apparatus

A micropipette is provided including at least one substrate, an inlet port through which a sample is delivered from the outside, a cavity to be poured and filled with the sample, an introduction hole, and an injection port for expelling the sample are formed on the at least one substrate. The substrate for forming the cavity is made of ceramics, a piezoelectric / electrostrictive element is provided for at least one wall surface of the substrate, and the sample moves as a laminar flow in the cavity. The volume of the cavity is changed by driving the piezoelectric / electrostrictive element to expell a certain amount of the sample in the cavity from the injection port. According to the micropipette, it is possible to form microspots with high accuracy and high speed. According to a dispenser including the micropipette, it is possible to efficiently dispense hundreds to ten thousands of different samples at one time and form microspots. Therefore, productivity is remarkably improved.
Owner:NGK INSULATORS LTD

Tapered distribution plate structure type gas-solid fluidized bed separation device and method

InactiveCN109013315AOvercome the problem of poor stabilityImprove sorting effectGas current separationGas solidFluidized bed
The invention discloses a tapered distribution plate structure type gas-solid fluidized bed separation device and method, and belongs to the technical field of coal dry separation. The device is composed of a fluidized bed body which is vertically arranged, a feeding and medium filling chute and a pushing wheel which are arranged on the upper portion of the fluidized bed body and an air chamber, an air distribution plate, an air inlet pipe and a discharge valve which are arranged on the lower portion of the bed body, and the air distribution plate is arranged in the air chamber and is in a tapered shape. Compressed air is introduced into the air chamber arranged on the lower portion of the fluidized bed body through the air inlet pipe, the compressed air enters the device from the V-shapedinverted-tapered-shaped air distribution plate, vertically moves upwards in a bundling mode and is evenly distributed in the fluidized bed body, therefore, media in the fluidized bed body is fluidized, and a stable fluidized environment is formed; and upgraded clean coal and separated gangue are obtained from raw coal through the effect of the fluidizing media in the fluidized bed body. The tapered distribution plate structure type gas-solid fluidized bed separation device and method are simple in structure and convenient to use, can effectively solve the problem that holes, channels and deadbeds are generated in a bed layer due to the fact that air in the fluidized bed body is distributed unevenly and are suitable for being used and popularized.
Owner:CHINA UNIV OF MINING & TECH

Multi-parameter air-quality acquisition unit

The invention discloses a multi-parameter air-quality acquisition unit and relates to the technical field of air-quality monitoring. The multi-parameter air-quality acquisition unit comprises a surface cover, a bottom shell, an air-duct baffle plate, a circuit board, a CO2 sensor, a TVOC (Total Volatile Organic Compound) sensor, a PM2.5 sensor, a temperature-humidity sensor and a fan, wherein thebottom shell and the surface cover arranged above the bottom shell form a shell of the acquisition unit; the circuit board is arranged on the bottom shell; the air-duct baffle plate is arranged at themiddle part of the circuit board; the circuit board at one side of the air-duct baffle plate is provided with the CO2 sensor, the TVOC sensor, the PM2.5 sensor, the temperature-humidity sensor and the fan, and the circuit board at the other side of the air-duct baffle plate is provided with a communication module; the circuit board is provided with a wire-incoming groove hole; the side surface ofthe shell consisting of the surface cover and the bottom shell is provided with an air outlet, an air inlet, a network-line passing groove and a power-line passing groove. The multi-parameter air-quality acquisition unit disclosed by the invention has the advantages that online real-time monitoring of five air-quality parameters is realized, so that the cost of data acquisition is reduced, and the reliability of air-quality acquisition is improved.
Owner:焦洋

Method for ammoxidation preparation of 2,4-dichlorobenzonitrile

The invention relates to a method for the ammoxidation synthesis of 2,4-dichlorobenzonitrile to mainly solve problems of bad fluidization quality and low yield, or low yield and high production cost after using a fixed bed existing in fluidized bed reactors in present production technologies. The method which adopts 2,4-dichlorotoluene, ammonia and air as raw materials comprises a step that the raw materials contact and react with a catalyst in a fluidized bed under conditions that the raw material ratio of the 2,4-dichlorotoluene to the ammonia to the air is 1:2-10:4-40, the reaction temperature is 300-500DEG C, the reaction pressure is 0.01-0.1Mpa and the catalyst load (WWH) is 0.03-0.1h<-1> to generate the 2,4-dichlorobenzonitrile. The method well solves the problems and can be used for the industrial production of the ammoxidation synthesis of the 2,4-dichlorobenzonitrile.
Owner:CHINA PETROLEUM & CHEM CORP +1

Method for improving the performance of gallium nitride based field effect transistor

InactiveCN100594591CSolve the current collapse effectSolve the collapse effectSemiconductor/solid-state device manufacturingSemiconductor materialsSurface oxidation
The invention relates to the technical field of production of wide bandgap semiconductor materials and devices and discloses a method for improving the performance of a GaN-based field-effect transistor, the method comprises: mixed pre-treatment solution is adopted to carry out the surface pre-treatment of the surface of a device before the passivation of the GaN-based field-effect transistor during the production process of the GaN-based field-effect transistor, then a compound dielectric layer of silicon nitride and oxygen-rich silicon nitride is deposited on the surface of the device afterthe surface pre-treatment, and the GaN-based field-effect transistor is passivated. The use of the method can solve a surface original oxide layer which is existed on the surface of AlGaN for a long time, eliminate the AlGaN surface state which is induced by the surface oxide layer, solve the surface state existing in an AlGaN and silicon nitride interface, the current collapse effect which is induced by the surface original oxide layer and the significant increase of the reverse gate leakage current caused by the conventional passivation and improve the stability and the reliability of GaN-based HEMT.
Owner:SEMICON MFG INT (SHANGHAI) CORP +1

Multi directional device for vapor-solid mixing

A packing system is disclosed that has a series of flat blades arranged to promote mixing in a fluidized bed such as one in a FCC stripper, with an upward flowing gas stream and a downward flowing solid particle stream. The blade arrangement provides for different gas solids flow directions within a single layer of packing system to enhance cross mixing of gas and catalyst in all directions and reduces the potential for gas and catalyst bypassing. The blade arrangement has splits which minimizes the tendency for phase separation around the blade. The arrangement and sizing of the blades is intended to promote intimate contact between the two phases to ensure efficient mass transfer of material trapped inside the particles to the gas phase. The arrangement of the blades prevents excessive bubble growth and channeling, both of which reduce surface area for mass transfer.
Owner:TECH PRECESS TECH INC

Low-temperature polycrystalline silicon thin film transistor, manufacturing method, array substrate and display device

The invention provides a low-temperature polycrystalline silicon thin film transistor, a manufacturing method, an array substrate and a display device, and belongs to the technical field of displaying. The manufacturing method comprises the steps of: using low-temperature polycrystalline silicon thin film forming the active layer includes a source region and a drain region, said source region for contact with the source electrode of the thin film transistor, said drain region for contact with the drain electrode of the thin film transistor; the source low-temperature polysilicon thin film surface region and a drain region forming an amorphous silicon layer; the surface of the low-temperature polycrystalline silicon thin film formed on the amorphous silicon layer by ion implantation. The transistor can reduce the channel effect, so that the depth of ion implantation uniformity better uniformity of the threshold voltage of the thin film transistor is preferably, and to achieve ultra-shallow source and drain junctions.
Owner:BOE TECH GRP CO LTD
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