To realize stable supply and measurement of micro flow, the invention provides a micro flow supply measuring device. The device comprises a
constant pressure unit, a supply unit and a measuring unit;the
constant pressure unit comprises an automatic pressure regulating device and a
constant pressure balancing container; the inlet of the constant
pressure balance container is connected with an airsource through the automatic pressure regulating device, and the outlet of the constant
pressure balance container is connected with the supply unit; the supply unit comprises a
propellant supply container, an electronic scale, a first vibration damping
assembly and a supply pipeline, wherein the inlet of the
propellant supply container is connected with the outlet of the constant pressure balancecontainer, and the outlet of the
propellant supply container is connected with the measuring unit through the supply pipeline; the electronic scale is arranged below the propellant supply container,and the first vibration damping
assembly is arranged below the electronic scale; the measuring unit comprises a first capillary tube, a
mass flow meter, a second capillary tube and a measuring pipeline, the first capillary tube, the
mass flow meter, the second capillary tube and the measuring pipeline are connected in sequence, and a second filter, a second pneumatic control valve and a pneumaticdischarge valve are arranged on the measuring pipeline; and the inlet of the first capillary tube is connected to the supply pipeline.