13results about How to "High cleanliness requirements" patented technology

The invention relates to the technical field of air purification and ventilation, and discloses a circulation control method and system for a pressure difference channel of a clean laboratory and a storage medium, the method is based on a clean conveying line and a dirty conveying line, each line comprises a conveying channel, a buffer cabin and a sealing door, and an air feeder and an exhaust fan are arranged in the channels respectively. The rotating speed and the working time of the fan are adjusted according to the volume and the number of the flow devices by obtaining the flow instruction, and the conveying line can be disinfected according to the cleaning instruction. According to the method, pollution can be effectively avoided, circulation requirements can be accurately matched, the conveying line is regularly cleaned, the operation quality of a clean laboratory is comprehensively guaranteed, and it is ensured that the requirement for high cleanliness of an experiment space is met.

The application relates to the field of semiconductor process equipment, in particular to a device for large-capacity liquid medicine storage of semiconductor equipment and a liquid medicine supply system. The device comprises a liquid storage tank provided with a liquid storage cavity, the upper portion of the liquid storage cavity is provided with a cleaning cavity in fluid communication with the liquid storage cavity; the internal volume of the cleaning cavity is smaller than that of the liquid storage cavity; a liquid inlet pipe is arranged to introduce liquid medicine into the liquid storage cavity of the liquid storage tank from the outside; a liquid outlet pipe is arranged at the bottom of the liquid storage cavity and connects the liquid storage cavity of the liquid storage tank to a liquid source; a waste pipe is arranged at the top of the cleaning cavity to discharge the liquid medicine bubbles in the cleaning cavity; and a vent pipe is arranged to connect the cleaning cavity of the liquid storage tank with the outside to keep the air pressure in the cleaning cavity of the liquid storage tank consistent with the ambient air pressure. The application improves the separation efficiency of large-capacity liquid medicine and gas, reduces the probability of generating bubbles in the liquid medicine, improves the uniformity of wafer surface coating, and can meet the high-integration equipment layout.

The utility model relates to wafer box cleaning equipment which comprises a bottom rack and a top support which are used for supporting and connecting all parts, the top support is installed above the bottom rack, the left end and the right end of the top support are respectively provided with an air shower device, and a cleaning conveying device is installed in the top support. A pick-and-place conveying device is installed at one end of the clean conveying device, automatic door devices are further installed at the positions, located at the two ends of the clean conveying device, of the top support respectively, and a control box used for controlling actions is further installed above the bottom rack. According to the technical scheme, automatic conveying and cleaning of the wafer box can be achieved, the device is matched with a crown block to act, manual operation is not needed in the whole process, two hands are completely liberated, and practicability is higher.

The invention provides automatic sand classifying and carrying equipment for semiconductors and solar quartz crucibles. The automatic sand classifying and carrying equipment comprises a classifying and lifting mechanism, a classifying and rotating mechanism and at least two sand charging barrels, under the combined action of the classification lifting mechanism and the classification rotating mechanism, the sand charging barrel can rotate and lift at a preset original point; the discharging position of each sand using material barrel is connected with a sand using material distributing assembly, and each sand using material distributing assembly comprises a classifying material barrel opening and closing valve used for controlling the opening degree of the discharging position of the corresponding sand using material barrel. According to the automatic classifying and carrying equipment, the premise requirement for automation of quartz crucible production can be met, and the quartz sand adding precision and cleanliness are improved.

The invention relates to a three-way valve for conveying chemical liquid medicine in semiconductor manufacturing. The three-way valve sequentially comprises a mechanism body and a mounting bottom plate from top to bottom. A mechanism inlet, a first mechanism outlet and a second mechanism outlet are formed in the mechanism main body, an embedded sleeve is arranged in a working chamber in the mechanism main body, the middle part of the embedded sleeve is communicated with the mechanism inlet, the upper part of the embedded sleeve is communicated with the first mechanism outlet, and the lower part of the embedded sleeve is communicated with the second mechanism outlet; the three-way valve further comprises an executing mechanism assembly and a three-way valve sealing assembly. The sealing structure of a conventional valve is optimized, so that the probability of generating particulate matters is greatly reduced in the operation process of the valve.

The application provides a preparation method of high-end electronic-grade polyimide film, and the film is prepared from diamine monomers, dianhydride monomers and cross-linking fluorine-containing reaction monomers through polymerization, doping, casting, two-way stretching and gradient imidization. The application effectively solves the problems of high thermal expansion coefficient, large high-frequency dielectric loss and poor size stability of the existing polyimide film by introducing rigid cross-linking units containing fluorine into the molecular chain, and combining multi-batch low-temperature polymerization, multi-layer gradient filtration, simultaneous two-way stretching and segmented gradient imidization process. The method is stable in process, the product has excellent comprehensive performance, and is suitable for fields of 5G high-frequency communication flexible copper-clad plate and chip packaging substrate.

An embodiment of the present application provides a mobile phone back panel cleaning machine with a turret, including a cleaning platform conveying device; a front feeding device is provided at the starting end of the cleaning platform conveying device, and a tail discharging device is provided at the end; a back panel plane cleaning mechanism, a turret cleaning mechanism and a back panel dust blowing mechanism are sequentially arranged above the cleaning platform conveying device in the horizontal direction; focused cleaning of the areas on the outer edge area of ​​the turret that cannot be cleaned in the prior art is achieved, and orderly cleaning between each process is achieved, while the turret edge area is cleaned The plane area of ​​the back panel of the mobile phone is cleaned; automatic feeding, transfer and cleaning ensure the efficiency and quality of cleaning.

The utility model relates to a reflow soldering furnace with an integrated welding hearth, the welding hearth of the reflow soldering furnace comprises a hearth welding assembly and a motor assembly, and the hearth welding assembly comprises an upper hearth welding assembly and a lower hearth welding assembly which are connected through welding. A heating module and a cooling module are arranged between the upper hearth welding assembly and the lower hearth welding assembly; the motor assembly comprises a motor and a separator, a through hole is formed in the separator, and a motor shaft of the motor penetrates through the through hole to enter the hearth welding assembly. Compared with the prior art, the hearth welding assemblies are of an integrated structure, the upper hearth welding assembly and the lower hearth welding assembly are connected in a welded mode, cleanliness is easier to maintain, heat conduction efficiency is higher, the heat preservation effect is better, and power consumption of equipment under the same working condition is lower; and the heat-insulating cotton and parts which are easy to generate dust or stains are arranged outside the hearth welding assembly, so that the cleanliness in the hearth is not influenced, and the like.

This utility model discloses a sealing assembly suitable for clean environments, comprising a C-shaped ring and a back pressure ring disposed radially outside the C-shaped ring. The C-shaped ring comprises a ring body made of spring steel, with two axial ends forming a sealing portion. The sealing portion protrudes axially from the axial end face of the back pressure ring, and a polyimide coating is also provided on the outer side of the sealing portion. This sealing assembly does not require machining of the ring body during manufacturing, and the sealing portion exhibits excellent high-temperature resistance and wear resistance, thereby preventing the generation of particulate matter during use and meeting the sealing requirements of clean environments. This sealing assembly is particularly suitable for applications requiring high cleanliness, such as semiconductor manufacturing equipment, and for sealing scenarios involving alternating temperature and / or pressure changes and frequent, large-amplitude opening and closing.

The utility model provides a detection platform based on an atomic force microscope, which relates to the field of microscopic detection, and comprises a base, a detection table is fixedly connected onto the base, a back seat is fixedly connected onto the base, a microscope assembly is arranged on the back seat, and side seats are arranged on two sides of the base; and the automatic combination mechanism comprises two combination shells, the two combination shells are arranged on the two side seats respectively, and a rear box is fixedly connected to the side wall of the back seat. According to the utility model, the fan is started, so that gas flows in a circulating channel formed by the air inlet pipe, the rear box, the exhaust pipe and the fan between the two combined shells, fine pollutants do not exist in a detection space, and the situation that the normal work of a detection sample and a microscope assembly is possibly influenced by fine dust particles is avoided; through linkage of components such as the motor, the driving shaft, the driving block and the combined shell, automatic combination of the detection space is realized, and a closed detection space is rapidly formed.

The invention discloses a multi-mode overhead line system insulator cleaning device which is specifically characterized in that a rail flat car serves as an integrated platform, an electrical control room is placed at the foremost end of the rail flat car, and a front-end insulator positioning recognition system and a front-end insulator leakage current detection system are sequentially placed at the top of the electrical control room; the water storage tank is located in the middle of the rail flat car, isolates a cleaning agent from cleaning water and supplies water to the cleaning agent water cannon and the cleaning water cannon. The generator power supply chamber is arranged at the rear end of the rail flat car and provides electric power and water pressure power for automatic flushing for the whole system, and a rear-end insulator leakage current detection system and a rear-end insulator positioning recognition system are arranged at the top of the generator power supply chamber. The problem of automatic cleaning of the contact network insulator is solved, the space utilization rate is increased, the positioning accuracy and precision are enhanced, the requirements of different scenes are met, and basic guarantee is provided for development of an intelligent operation and maintenance system of the contact network insulator.

The invention discloses inflation and exhaust cleaning equipment for a Dewar inner cavity of a refrigeration type infrared detector, and belongs to the technical field of refrigeration type infrared detector packaging. The equipment comprises a rack, an inflation interface, an exhaust interface, an installation interface and a custom module, the installation interface is provided with a replaceable inflation and exhaust unit and a pressing device with a pressure sensor, and sealing adaptation of multi-specification Dewar shells is achieved; the exhaust unit constructs a vacuum environment through a dry vacuum pump, the inflation unit can achieve pressure multi-gear switching and pulse type air blowing, and the inflation unit and the pressure multi-gear switching are matched to form a'blowing-pumping-replacement 'circulation process. The equipment is provided with an operation panel controlled by a PLC (Programmable Logic Controller), full-process automatic control of cleaning is realized, self-defined modules such as a strong magnetic module, an electrostatic adsorption module, a vibration module and the like and a high-temperature baking module can be additionally arranged, and various foreign matters are removed in a targeted manner. The equipment is high in cleaning efficiency and adaptability, the cleanliness of an inner cavity of the Dewar can be accurately controlled, the production quality of the refrigeration type infrared detector is effectively improved, and the service life of the refrigeration type infrared detector is effectively prolonged.

The invention discloses an energy-saving building glass curtain wall intelligent cleaning device which comprises a supporting platform, a guide mechanism, a suspension mechanism, a cleaning unit, an adjusting mechanism and a control unit, the supporting platform is used for installing components of a fixing device, and the guide mechanism is connected with a vertical rail arranged on the outer side of a glass curtain wall; the suspension mechanism drives the supporting platform to move up and down along the vertical rail, the cleaning unit is used for cleaning the glass curtain wall, the adjusting mechanism is used for adjusting the position of the cleaning structure, and the control unit controls the adjusting mechanism, the water supply pump and the suspension mechanism to work. The intelligent glass curtain wall cleaning device has the advantages that the automatic window cleaning function is achieved by simulating the whole manual window cleaning process action, manual cleaning action is mechanized and automatic, the stable, reliable, efficient and energy-saving intelligent glass curtain wall cleaning device is formed, and the intelligent glass curtain wall cleaning device is few in energy consumption part, low in energy consumption, energy-saving, environmentally friendly, low in cost and capable of meeting the requirement for high cleanliness at the same time.