6results about How to "High cleanliness requirements" patented technology

The application relates to the field of semiconductor process equipment, in particular to a device for large-capacity liquid medicine storage of semiconductor equipment and a liquid medicine supply system. The device comprises a liquid storage tank provided with a liquid storage cavity, the upper portion of the liquid storage cavity is provided with a cleaning cavity in fluid communication with the liquid storage cavity; the internal volume of the cleaning cavity is smaller than that of the liquid storage cavity; a liquid inlet pipe is arranged to introduce liquid medicine into the liquid storage cavity of the liquid storage tank from the outside; a liquid outlet pipe is arranged at the bottom of the liquid storage cavity and connects the liquid storage cavity of the liquid storage tank to a liquid source; a waste pipe is arranged at the top of the cleaning cavity to discharge the liquid medicine bubbles in the cleaning cavity; and a vent pipe is arranged to connect the cleaning cavity of the liquid storage tank with the outside to keep the air pressure in the cleaning cavity of the liquid storage tank consistent with the ambient air pressure. The application improves the separation efficiency of large-capacity liquid medicine and gas, reduces the probability of generating bubbles in the liquid medicine, improves the uniformity of wafer surface coating, and can meet the high-integration equipment layout.

The application provides a preparation method of high-end electronic-grade polyimide film, and the film is prepared from diamine monomers, dianhydride monomers and cross-linking fluorine-containing reaction monomers through polymerization, doping, casting, two-way stretching and gradient imidization. The application effectively solves the problems of high thermal expansion coefficient, large high-frequency dielectric loss and poor size stability of the existing polyimide film by introducing rigid cross-linking units containing fluorine into the molecular chain, and combining multi-batch low-temperature polymerization, multi-layer gradient filtration, simultaneous two-way stretching and segmented gradient imidization process. The method is stable in process, the product has excellent comprehensive performance, and is suitable for fields of 5G high-frequency communication flexible copper-clad plate and chip packaging substrate.

This utility model discloses a sealing assembly suitable for clean environments, comprising a C-shaped ring and a back pressure ring disposed radially outside the C-shaped ring. The C-shaped ring comprises a ring body made of spring steel, with two axial ends forming a sealing portion. The sealing portion protrudes axially from the axial end face of the back pressure ring, and a polyimide coating is also provided on the outer side of the sealing portion. This sealing assembly does not require machining of the ring body during manufacturing, and the sealing portion exhibits excellent high-temperature resistance and wear resistance, thereby preventing the generation of particulate matter during use and meeting the sealing requirements of clean environments. This sealing assembly is particularly suitable for applications requiring high cleanliness, such as semiconductor manufacturing equipment, and for sealing scenarios involving alternating temperature and / or pressure changes and frequent, large-amplitude opening and closing.

The utility model provides a detection platform based on an atomic force microscope, which relates to the field of microscopic detection, and comprises a base, a detection table is fixedly connected onto the base, a back seat is fixedly connected onto the base, a microscope assembly is arranged on the back seat, and side seats are arranged on two sides of the base; and the automatic combination mechanism comprises two combination shells, the two combination shells are arranged on the two side seats respectively, and a rear box is fixedly connected to the side wall of the back seat. According to the utility model, the fan is started, so that gas flows in a circulating channel formed by the air inlet pipe, the rear box, the exhaust pipe and the fan between the two combined shells, fine pollutants do not exist in a detection space, and the situation that the normal work of a detection sample and a microscope assembly is possibly influenced by fine dust particles is avoided; through linkage of components such as the motor, the driving shaft, the driving block and the combined shell, automatic combination of the detection space is realized, and a closed detection space is rapidly formed.

The invention discloses a multi-mode overhead line system insulator cleaning device which is specifically characterized in that a rail flat car serves as an integrated platform, an electrical control room is placed at the foremost end of the rail flat car, and a front-end insulator positioning recognition system and a front-end insulator leakage current detection system are sequentially placed at the top of the electrical control room; the water storage tank is located in the middle of the rail flat car, isolates a cleaning agent from cleaning water and supplies water to the cleaning agent water cannon and the cleaning water cannon. The generator power supply chamber is arranged at the rear end of the rail flat car and provides electric power and water pressure power for automatic flushing for the whole system, and a rear-end insulator leakage current detection system and a rear-end insulator positioning recognition system are arranged at the top of the generator power supply chamber. The problem of automatic cleaning of the contact network insulator is solved, the space utilization rate is increased, the positioning accuracy and precision are enhanced, the requirements of different scenes are met, and basic guarantee is provided for development of an intelligent operation and maintenance system of the contact network insulator.

The invention discloses inflation and exhaust cleaning equipment for a Dewar inner cavity of a refrigeration type infrared detector, and belongs to the technical field of refrigeration type infrared detector packaging. The equipment comprises a rack, an inflation interface, an exhaust interface, an installation interface and a custom module, the installation interface is provided with a replaceable inflation and exhaust unit and a pressing device with a pressure sensor, and sealing adaptation of multi-specification Dewar shells is achieved; the exhaust unit constructs a vacuum environment through a dry vacuum pump, the inflation unit can achieve pressure multi-gear switching and pulse type air blowing, and the inflation unit and the pressure multi-gear switching are matched to form a'blowing-pumping-replacement 'circulation process. The equipment is provided with an operation panel controlled by a PLC (Programmable Logic Controller), full-process automatic control of cleaning is realized, self-defined modules such as a strong magnetic module, an electrostatic adsorption module, a vibration module and the like and a high-temperature baking module can be additionally arranged, and various foreign matters are removed in a targeted manner. The equipment is high in cleaning efficiency and adaptability, the cleanliness of an inner cavity of the Dewar can be accurately controlled, the production quality of the refrigeration type infrared detector is effectively improved, and the service life of the refrigeration type infrared detector is effectively prolonged.