On the basis of a self-supporting substrate for epitaxial
crystal growth containing a Group 13 element
nitride crystal selected from
gallium nitride, aluminum
nitride,
indium nitride, or a
mixed crystal thereof,
cracking of the self-supporting substrate or the epitaxial
crystal in a process of growing the epitaxial crystal is prevented. A self-supporting substrate for epitaxial
crystal growth (21) containing a Group 13 element nitride crystal selected from
gallium nitride, aluminum nitride,
indium nitride, or a
mixed crystal thereof has a
nitrogen-polarity face (21a) and a Group 13 element-polarity face (21b). The
nitrogen-polarity face (21a) is convexly curved, and a chamfered portion (21c) is provided at an outer
peripheral portion (22) of the
nitrogen-polarity face (21a).