The invention relates to the technical field of communication
chip semiconductors, and provides a manufacturing method of a communication
laser semiconductor chip. The method comprises the following steps of: S1, performing stripping and clamping on a
wafer of which the end surface is to be coated to obtain a Bar strip, and
processing the Bar strip; S2, sequentially
coating the light emitting cavity surface of the to-be-plated Bar strip
after treatment with three
layers of high-
transmittance film systems, wherein the three
layers of high-
transmittance film systems are respectively a first Si film, a first SiO film and a first SiO2: H film; and S3, after
film coating of the light emitting cavity surface is completed, sequentially
coating the backlight cavity surface of the Bar strip to be coated with four
layers of high-reflection film systems, wherein the four layers of high-reflection film systems are a second SIO film, a second Si film, a second SiO2: H film and a third Si film respectively. The invention also provides the communication
laser semiconductor chip. The chip is manufactured by the manufacturing method of the communication
laser semiconductor chip. The end face film
system adopts a pure Si multi-layer film, so that the lattice matching degree between film layers can be effectively improved, and the influence of excitons, defects and lattice vibration caused by high
lattice mismatch ratio on the
light absorption coefficient is reduced.