3results about How to "Good thermal insulation" patented technology

The invention relates to a pushing piston assembly for a Stirling cryocooler. A pushing air floatation neck bush is fixed to the inner side of a guide piston, and a first gap is formed between the pushing air floatation neck bush and the guide piston. A valve plate component is arranged on the inner side of the guide piston and corresponds to the air suction hole; a porous medium part is arranged at the position, right opposite to the first gap, of the pushing air floatation neck bush, and the porous medium part communicates with a first micro-ring groove located around the guide piston through a first small hole in the pushing air floatation neck bush. A second micro-ring groove is formed in the position, close to the first micro-ring groove, of the periphery of the guide piston, a second gap is formed between the area between the first micro-ring groove and the second micro-ring groove and the guide piston, and the first micro-ring groove communicates with the second micro-ring groove through the second gap. By parity of reasoning, the Nth micro-ring groove is communicated with the (N + 1) th micro-ring groove through the (N + 1) th gap; a second small hole partially coinciding with the (N + 1) th micro-ring groove is formed in the position, where the (N + 1) th micro-ring groove is located, of the guide piston, and the second small hole communicates with the outside of the side wall of the guide piston.

This invention provides a purging device and semiconductor deposition equipment, overcoming the shortcomings of uneven purging and inability to form a complete gas curtain in the transport channel of existing MOCVD equipment. The device sets the first and second purging channels at specific angles, so that the two airflows converge in the chamber in front of the valve plate and are located inside the chamber, thereby forming a fully enclosed protective gas curtain from top to bottom without dead angles. This effectively blocks the diffusion of reactive gases to the valve plate side, improves the dustproof and heat protection effect of the valve plate, and enhances the operational stability and safety of the equipment.

The utility model discloses a kind of exhaust device of drying room, including frame body, and electric cylinder;It further includes the support of being fixedly connected to frame body outside;The cylinder body of electric cylinder is fixedly connected on support, the push rod of electric cylinder is perpendicular to frame body surface and is directed to frame body center place;Push rod end is fixedly connected with a sealing plate, and the inside of frame body is provided with stepped groove, and sealing plate is embedded in stepped groove when closing;Sealing plate outside is fixedly connected with a flow guide plate that passes out frame body, and the flow guide plate is used to block the circulating airflow in drying room and export circulating airflow from frame body;Sealing plate outside is provided with guide rod, and the guide rod is guided and is arranged on support.