According to the trace
impurity purification
system provided by the utility model, during purification of the first adsorber,
helium passes through the second pneumatic control valve, the first adsorber and the pneumatic switch valve, and during regeneration of the first adsorber, the second pneumatic control valve and the third pneumatic switch valve are closed; high-pressure normal-temperature
helium enters the first
heat exchanger through the first pneumatic control valve and the second pneumatic switch valve, and enters the
helium low-temperature
system low-pressure pipeline after being subjected to heat exchange through the first
heat exchanger. Low-temperature and high-pressure helium in the first adsorber enters a third
heat exchanger through a sixth pneumatic switch valve and then enters a helium
recovery air bag through a fifth pneumatic control valve, the
vacuum pump performs
vacuum extraction, according to the logic, when the second adsorber works, the first adsorber regenerates, and the operation is repeated, so that the helium is recovered.
Automatic control over trace
impurity purification, purification
system regeneration switching and the like is achieved, automatic
continuous operation of a large helium low-temperature system can be achieved, and the
automation degree of the system is improved.