1results about How to "Efficient Adsorption Separation" patented technology

This invention discloses a core-shell material for the separation of fluorine-containing electronic specialty gases and its preparation method. Addressing the separation needs of fluorine-containing electronic specialty gases such as SF6 and CF4 commonly used in the semiconductor and photovoltaic industries, this invention uses monodisperse PSD microspheres as the core and in-situ grows HKUST-1 under controlled low-temperature synthesis conditions to prepare a core-shell MOF composite material. The adsorption selectivity, separation performance, and mechanism of this material for fluorine-containing gas / nitrogen mixtures were investigated. The prepared PSD@HKUST-1 core-shell material exhibits a tunable pore structure and abundant adsorption sites, demonstrating excellent separation performance for fluorine-containing electronic specialty gases, enabling efficient recovery and purification of these gases. This invention features a simple process and novel structural design, showing promising application prospects in the fields of electronic chemical purification and waste gas treatment.