54 results about "Ionic contamination" patented technology

A method and system for supplying an ultra-pure fluid to a substrate process chamber using point-of-use filtration and purification. The method and system provide ability to automatically monitor and control contamination levels in fluids in real time and to stop substrate processing when contamination levels exceed predetermined thresholds. In one aspect, the invention is a system comprising: a fluid supply line adapted to supply a fluid to the process chamber; filtration means operably coupled to the fluid supply line for removing positively and negatively charged particles from the fluid prior to the fluid passing into the process chamber; a purifier operably coupled to the fluid supply line in series with the filtration means for removing ionic contaminants from the fluid prior to the fluid passing into the process chamber; sensor means for repetitively measuring particle and ionic impurity levels in the fluid that has passed through the filtration means and the purifier, the sensor means producing signals indicative of the measured particle and ionic impurity levels; a controller electrically coupled to the sensor means for receiving the signals created by the sensor means, the controller adapted to respectively compare the measured particle level and the measured ionic impurity level indicated by the signals to a predetermined particle threshold and a predetermined ionic impurity threshold, wherein upon the controller determining that either the measured particle level is above the predetermined particle threshold and / or that the measured ionic impurity level is above the predetermined ionic impurity threshold, the controller further adapted to (1) activate means to alert a user, (2) cease processing of substrates in the process chamber, and / or (3) prohibit processing of substrates in the process chamber.

The present invention is directed to a sorbent comprising a disordered polyvalent metal oxide on the surface of an inert substrate. The substrate can be a layered silicate, such as vermiculite, an aluminosilicate such as montmorillonite, or a nonlayered silicate such as a zeolite. The sorbent removes ionic contaminants, such as arsenic, from process streams.

The invention provides a non-halogen cleaning-free soldering flux, which comprises the following compositions in percentage by weight: 0.5 to 5 percent of stannous oxalate, 0.5 to 20 percent of organic acid activator, 0.1 to 1 percent of surfactant, 0 to 3 percent of cosolvent, and the balance of solvent. Because of adopting the stannous oxalate as an activator, and having synergistic action withthe organic acid activator and no halogen, the soldering flux has the advantages of no irritant odour, less smoke, no environmental pollution, strong wetting power and excellent weldability. When thesoldering flux is used for welding, a printed package board has less solid residue, clean layout and low ionic contamination, and needs no cleaning after the welding; and the printed package board has high insulation resistance after the welding, which can meet the cleaning-free requirement of the printing package board.

The invention relates to a weakly acidic copper polishing solution applicable to low downforce and belongs to the technical field of microelectronics auxiliary materials and ultra-precision machining processes. The polishing solution comprises abrasive particles, an oxidant, deionized water, an inhibitor, a complexing agent and a silica sol stabilizer; and the pH value of the polishing solution is 5-7. By adopting the weakly acidic copper polishing solution, high removal speed and high surface accuracy of copper polishing are achieved under the condition of low downforce (below 1 psi) and the surface of polished copper has less residues of abrasive particles and ionic contamination.

A hard disk drive inner part formed of a resin which exhibits well-balanced low outgassing properties, ultrasonic cleaning resistance, low ionic contamination properties, low particulate contamination properties, repeated removability, heat resistance, specific gravity, and water-absorbing properties. The hard disk drive inner part includes a resin composition which includes a polyphenylene ether resin (A).