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42results about How to "Achieve leak" patented technology

Treatment system and method for consolidating soft soil foundation by utilizing industrial waste gas heat

The invention provides a treatment system and a method for consolidating a soft soil foundation by utilizing industrial waste gas heat. The treatment system comprises an industrial waste gas heat separation device, a waste gas purification device, a tail gas collection and treatment system, a foundation soil mixing device and a gas pumping device. The method comprises the following steps of extracting pure carbon dioxide from the dedusted, desulfurized and denitrated waste gas heat by the separation device and the purification device; mixing a curing agent to foundation soil by the mixing device; and pumping the pure carbon dioxide into mixed soil by the gas pumping device to carbonize and consolidate the soft soil foundation. The waste gas purification device comprises an absorption chamber and a decomposition chamber which are sealed devices with valves, and a purification solution in the device is an alkali solution or a carbonate solution, or a mixture thereof, and can be recycled. The method and the treatment system fully utilize the industrial waste gas heat, so that the difficulty of resource utilization of the industrial waste gas heat is solved, and meanwhile, the construction efficiency of foundation consolidation and the strength of foundation soil are improved.
Owner:SOUTHEAST UNIV

Load-sensitive hydraulic system and power matching control method, device and system

ActiveCN103671336AImproved handling and reliabilityImprove Control ConsistencyServomotor componentsThrottleControl valves
The invention relates to the technical field of engineering machinery, and discloses a load-sensitive hydraulic system, a power matching control method, device and system and an engineering machine. The load-sensitive hydraulic system, the power matching control method, device and system and the engineering machine are used for improving the control conformance, the dynamic responsiveness and the stability of the load-sensitive hydraulic system and the control performance of power matching. The load-sensitive hydraulic system comprises a variable pump assembly, a main control valve set, an actuator, an overflow valve and a flow control valve set. An oil inlet of the main control valve set is communicated with an oil outlet of the variable pump assembly, and a load-sensitive feedback oil path is arranged between a control oil port of the main control valve set and a control oil port of the variable pump assembly. Two oil ports of the actuator are communicated with two working oil ports of the main control valve set respectively. An inlet oil path of the overflow valve is communicated with the load-sensitive feedback oil path, and a switch valve is arranged on the inlet oil path of the overflow valve. An inlet oil path of the flow control valve is communicated with the load-sensitive feedback oil path, and the flow control valve comprises a proportional throttle valve and a first pressure-compensated valve arranged on an inlet oil path of the proportional throttle valve.
Owner:ZOOMLION HEAVY IND CO LTD

Leakage preventive hydrogen tank for hydrogen-powered automobile

The invention relates to a leakage preventive hydrogen tank for a hydrogen-powered automobile, belongs to the technical field of new energy automobiles, and aims at solving the problem that a hydrogentank of a hydrogen-powered automobile in the prior art possibly leaks during use and potential risk is caused. The leakage preventive hydrogen tank for the hydrogen-powered automobile comprises an inner layer of the hydrogen tank, an outer layer of the hydrogen tank, a solid hydrogen storing material which is arranged between the inner layer of the hydrogen tank and the outer layer of the hydrogen tank, a hydrogen leakage detecting device and a data receiving and handling system, wherein the hydrogen leakage detecting device is used for detecting whether hydrogen leaks between the inner layerof the hydrogen tank and the outer layer of the hydrogen tank; and the solid hydrogen storing material is used for absorbing the possibly leaked hydrogen. With the adoption of the leakage preventivehydrogen tank for the hydrogen-powered automobile, the technical effects of detecting hydrogen leakage and preventing hydrogen from leaking into air can be achieved; the shortages in the prior art aresolved; and the leakage preventive hydrogen tank for the hydrogen-powered automobile has outstanding substantive characteristics and obvious progress.
Owner:河北世昌汽车部件股份有限公司 +1

Feed-sideways waveguide conversion structure with suspended strip line

The invention discloses a feed-sideways waveguide conversion structure with a suspended strip line and aims at providing a conversion structure which is wide in band, low in insertion loss and compactin structure. The feed-sideways waveguide conversion structure is achieved through the technical scheme as follows: a microstrip dielectric plate (3) extends to a step waveguide ridge (2) in a suspended microstrip cavity through a slit; an extension part is provided with the microstrip dielectric plate (3), the suspended strip line (4), an impedance transformer (7), a connection pad (6) and the step waveguide ridge (2) and is finally guided to an inner wall at a wide side of a waveguide to achieve energy conversion in a magnetic coupling manner, wherein the suspended strip line (4), the impedance transformer (7), the connection pad (6) and the step waveguide ridge (2) are arranged on the microstrip dielectric plate (3); the step waveguide ridge is parasitically fixed on a bottom plate ina waveguide cavity; the suspended strip line (4) extends along the upper surface of the microstrip dielectric plate from a port of a narrow slot and feeds electricity from the side surface of the waveguide cavity; and the correspondingly connected impedance transformer (7) and connection pad (6) are magnetically coupled to a transitional section structure and are matched with the step waveguide ridge through a quarter wavelength impedance transformer, thereby forming the waveguide conversion structure, with the suspended strip line, capable of inputting and outputting electromagnetic field energy in a feed-sideways manner.
Owner:LINGBAYI ELECTRONICS GRP

Reach stacker and container spreader

The invention discloses a container spreader, which comprises an opening and closing device for controlling the door of a container to be opened or closed. The opening and closing device is provided with a rotating arm and a driving device for driving the rotating arm to rotate. When the container is hoisted, the rotating arm is driven by the driving device to a position for pushing against the door of the container to be in a closed state; when the container is discharged, the rotating arm is driven by the driving device to rotate so as to be convenient for opening the door of the container. According to the container spreader disclosed by the invention, as the rotating arm which is driven by the driving device to rotate is arranged, the door of the container can be ensured to be in the closed state all the time in the hoisting process because the rotating arm pushes against the door of the container, thereby, the zero leakage of cargoes when the container is hoisted is simply and conveniently realized without other auxiliary tools. Moreover, when the container is discharged, the rotating arm is driven by the driving device to other positions, and thus, the limitation on the rotation of the door of the container can be removed, and the door of the container is opened so as to facilitate discharging, and the operation is simpler. The invention also discloses a reach stacker.
Owner:HUNAN SANY PORT EQUIP

Electric dialyzator for desalting fermentation liquor

The invention relates to an electric dialyzator which is suitable for desalting fermentation liquor. The electric dialyzator comprises an electrodialysis membrane stack unit, a plurality of sensors / transducers and a programmable logic controller (PLC) control unit; and an integrated device consists of different functional units and is suitable for performing electrodialysis on complex solutions such as the fermentation liquor so as to realize online monitoring of a plurality of parameters such as electric conductivity, pH, temperature, flow rate, pressure, current-voltage-electric consumption and the like in the electrodialysis desalting process of the fermentation liquor, facilitate system state diagnosis and system protection and realize optimization of process condition for the electrodialysis desalting of the fermentation liquor through feedback control. The problems that the conventional electric dialyzator has high energy consumption and is difficult to run stably for a long time when used in a fermentation liquor desalting process and that effective key parameter monitoring, process control and the like are not performed are solved and engineering application of electrodialysis desalting technology of the fermentation liquor is promoted.
Owner:INST OF PROCESS ENG CHINESE ACAD OF SCI

Intelligent sealing device for ship tail shaft numerical control magnetic fluid

The invention discloses an intelligent sealing device for ship tail shaft numerical control magnetic fluid. According to the main structure of the intelligent sealing device, a stuffing box is arranged at the sealed part of a tail shaft, one end of the box is provided with a gland, and the other end of the box is connected with a sternpost through a flange. Two layers of PTFE ring box sleeves are arranged in the middle of the box in parallel, and nx twelve radial hedging magnetic sector permanent magnets are embedded in each layer of box sleeve. Magnetic fluid circulating cavities are formed between the box sleeves in which the magnets are embedded and a shaft tube. The two sides of each permanent magnet box sleeve are each provided with a stainless steel circular ring and provided with eight magnetic fluid injecting or discharging holes, wherein the outer sides of the two stainless steel circular rings are each provided with a stainless steel clamping ring. An AH type metal framework teflon sealing ring is clamped on a tail shaft tube. An MCU is arranged, a magnetic fluid input pump and an electromagnetic overflow valve are controlled according to the pressure and temperature sensor information, the pressure in the magnetic fluid circulating cavities and the pressure at the draft of a warship and a submarine can be randomly the same, sealing, lubricating and cooling functions are achieved on the tail shaft tube through circulation of pressurized cold and hot magnetic fluid, and an electromagnetic sealing brake is arranged for strengthening static sealing of the tail shaft tube during downtime.
Owner:宝嘉智能科技(南通)有限公司

Preparation method for bismuth titanate film layer on basis of micro-arc oxidation technology

The invention discloses a preparation method for a bismuth titanate film layer on the basis of micro-arc oxidation technology. The preparation method comprises the following steps: a bismuth sheet and a platinum sheet which are the same in size are respectively used as an anode and a cathode; the bismuth sheet is burnished with several pieces of sand paper with different meshes and polished with a polishing paste, and the cleaning and oil removal of the bismuth sheet are performed sequentially via alcohol and acetone for standby; electrolyte with titanium concentration of 0.01-0.10 mol/L is prepared; the bismuth sheet keeps a distance of 1-3 cm from the platinum sheet, the bismuth sheet and the platinum sheet are vertically immersed into the electrolyte in a depth of 2-4 cm, magnetic agitation is started, and 1-5A constant current is electrified for 5-10 min; electric sparks are continuously generated on the surface of the bismuth sheet, a deposition layer is synchronously generated, and the bismuth sheet with the deposition layer is flushed with ion water and then dried at a temperature of 60 DEG C for 2 h, as a result, a bismuth titanate film layer is obtained. The bismuth titanate film layer preparation method is mild in synthesis conditions, can be completed under the conditions of normal temperature and normal pressure, and is quick in reaction speed and simple in operation steps; used bismuth is an environmental-friendly raw material, the process is safe, and no hazardous substance is leaked and discharged, so that environmental protection is facilitated.
Owner:QINGDAO AGRI UNIV

Oil mist sealing structure of hydraulic generator

The invention discloses an oil mist sealing structure of a hydraulic generator and belongs to the field of power generation equipment. The oil mist sealing structure is composed of a zero-clearance sealing part and a magnetic liquid sealing part, achieves rotary combined seal and is applicable to bearing oil mist seal of the hydraulic generator from the low speed to the high speed. A sealing shell of a combined sealing device is formed by connecting four bearing sealing covers through bolts. Firstly, four sealing split bodies are installed on the lower portions of the bearing sealing covers, composite flexible materials are adopted in the circumferential direction to connect the four sealing split bodies, zero-clearance sealing is formed under the radial and axial thrust effect of a small spring, and bearing oil mist is well sealed; then, by means of the magnetic liquid seal on the upper portions of the bearing sealing covers, the zero-leakage sealing effect is achieved; by combining the two kinds of seal, air pressure of a sealing cavity formed by the upper seal and the lower seal can be effectively kept, no negative pressure is produced in the cavity, overflow caused by the pressure difference between the high internal pressure and low bearing sealing cover external pressure can be effectively prevented, and the service life of the oil mist seal is prolonged.
Owner:ZIGONG ZHAOQIANG ENVIRONMENTAL PROTECTION TECH

Pipeline reconstruction sealing protective cover structure

The invention relates to a pipeline reconstruction sealing protective cover structure. The pipeline reconstruction sealing protective cover structure is characterized in that the pipeline reconstruction sealing protective cover structure is arranged at the fracture position of a single pipeline or the joint of a plurality of pipelines; and the pipeline reconstruction sealing protective cover structure comprises at least two shell structures, and the two shell structures include the pipeline reconstruction sealing protective cover upper shell and the pipeline reconstruction sealing protective cover lower shell. According to the pipeline reconstruction sealing protective cover structure, the outer sides of the pipelines are wrapped by a pipeline reconstruction sealing protective cover at thejoint of the pipelines; even if the pipelines are in a leaking state, leakage stopping can be completed without power failure and shutdown; pressure relief holes are formed in the shells, the pressure relief holes are opened in the leakage stopping process and blocked after blocking glue is solidified, and leakage stopping under the pressure state can be achieved; and besides, the blocking glue is only arranged at the joint gap of the shells, and bolts are not sealed, so that the blocking glue is convenient to remove in the later period, and the reconstruction sealing protective cover is convenient to reuse.
Owner:南通世睿电力科技有限公司

Magnetic drive submerged pump

The invention relates to a magnetic drive submerged pump. The magnetic drive submerged pump is characterized by comprising a pump body (11), a pump cover (12), a pump shaft (13), an impeller (14), a shaft bracket cylinder (2), bearing devices (31 and 32) disposed between the shaft bracket cylinder (2) and the pump shaft (13), a mechanical seal (5), an inner magnetic rotor (15), a spacer (16), an outer magnetic rotor (17), and a connecting rack (18). Bearing block discs (3), a seal gland (4), a rolling bearing (31) and a mechanical seal (5) are fixedly connected between end tubes (2a and 2b). The magnetic drive submerged pump is simple in structure, low in manufacturing cost, simple and convenient to assemble and maintain, good in airtightness and safe to use.
Owner:丹东克隆先锋泵业有限公司

A leak-proof hydrogen tank for hydrogen-powered vehicles

The invention relates to a leakage preventive hydrogen tank for a hydrogen-powered automobile, belongs to the technical field of new energy automobiles, and aims at solving the problem that a hydrogentank of a hydrogen-powered automobile in the prior art possibly leaks during use and potential risk is caused. The leakage preventive hydrogen tank for the hydrogen-powered automobile comprises an inner layer of the hydrogen tank, an outer layer of the hydrogen tank, a solid hydrogen storing material which is arranged between the inner layer of the hydrogen tank and the outer layer of the hydrogen tank, a hydrogen leakage detecting device and a data receiving and handling system, wherein the hydrogen leakage detecting device is used for detecting whether hydrogen leaks between the inner layerof the hydrogen tank and the outer layer of the hydrogen tank; and the solid hydrogen storing material is used for absorbing the possibly leaked hydrogen. With the adoption of the leakage preventivehydrogen tank for the hydrogen-powered automobile, the technical effects of detecting hydrogen leakage and preventing hydrogen from leaking into air can be achieved; the shortages in the prior art aresolved; and the leakage preventive hydrogen tank for the hydrogen-powered automobile has outstanding substantive characteristics and obvious progress.
Owner:河北世昌汽车部件股份有限公司 +1

Semiconductor process equipment and gas supply assembly thereof

The invention provides semiconductor process equipment and a gas supply assembly thereof. The gas supply assembly is used for providing process gas for a plurality of gas cabinets of the semiconductor process equipment, each gas cabinet comprises a cabinet body and a gas distribution disc arranged in the cabinet body, the gas supply assembly comprises a gas inlet pipeline, the gas inlet pipeline is provided with a gas inlet end and a plurality of gas outlet ends, the plurality of gas outlet ends are used to penetrate through gas inlets of the plurality of cabinet bodies in a one-to-one correspondence mode to be connected with the corresponding gas distribution discs, the gas supply assembly further comprises a sealing pipeline, the gas inlet pipeline is located in the sealing pipeline, the sealing pipeline is provided with a plurality of gas outlet sealing ends, the plurality of gas outlet sealing ends are used for being in sealing connection with the gas inlets of the plurality of cabinet bodies in a one-to-one correspondence mode, and the gas outlet sealing ends are used for being in sealing connection with the gas inlets of the plurality of the cabinet bodies in a one-to-one correspondence mode, and therefore, the sealing pipeline communicates with the interiors of the plurality of cabinet bodies. According to the semiconductor process equipment and the gas supply assembly thereof, the dangerous gas leaked from the gas inlet pipeline is limited by the sealing pipeline and does not leak into the environment, and the dangerous gas in the sealing pipeline can be sucked into a gas holder and then detected, so that the leakage detection of the gas inlet pipeline is realized, and the safety of the semiconductor process equipment is improved.
Owner:BEIJING NAURA MICROELECTRONICS EQUIP CO LTD

Safe lithium ion battery electrolyte packaging barrel

The invention discloses a safe lithium ion battery electrolyte packaging barrel, belongs to the technical field of lithium ion battery electrolyte packaging, and aims to solve the problems that a packaging barrel is of an integrated structure, lacks a protective damping structure, is inconvenient to move, is low in safety and lacks a pressure buffering structure, and an infusion tube is easily blocked by impurities. Through the arrangement of the outer barrel, the inner barrel, a rubber ring, a damping structure, a protective pad, a storage groove and a moving device, the packaging barrel can be separated, the inner barrel is subjected to damping protection, electrolyte leakage caused by impact is effectively avoided, and the packaging barrel is more convenient to move; through the arrangement of a first pressure limiting valve, a liquid storage cavity, a pressure buffering cavity, a second pressure limiting valve, a filter and a filter head, when the pressure in the liquid storage cavity is too high, part of pressure can be guided into the pressure buffering cavity to achieve pressure buffering, when the pressure in the liquid storage cavity and the pressure buffering cavity is too high, pressure relief is conducted in time, safety is higher, meanwhile, filtering and impurity removal of electrolyte can be achieved, and the service life of the electrolyte is prolonged. And the infusion tube is prevented from being blocked by sediments or floccules when the electrolyte is extracted.
Owner:山东天润新能源材料有限公司

Continuous Eucommia jelly freeze-out device

The invention discloses a continuous gutta-percha freezing-out device which comprises a freezing-out bucket with a freezing water inlet pipe, wherein the freezing water inlet pipe is connected with a plurality of heat exchange pipes with baffles and penetrates out of the freezing-out bucket through a freezing water return pipe, the heat exchange pipes are provided with fins and are vertically arranged, and a freezing water pipe is connected with a water hammer vibration exciter; the freezing-out bucket is provided with a to-be-frozen-out liquid inlet and an overflow reflux pipe; a spiral conveyer is arranged on one side of the bottom of the freezing-out bucket; an inverted conical structure is arranged on the other side of the freezing-out bucket and penetrates through a solid-liquid separation bucket through an axial-flow pump to be connected with a sieve mesh bucket; a bottom outlet of the sieve mesh bucket is connected with a spiral juicer; both the sieve mesh bucket and the spiral juicer are arranged in the solid-liquid separation bucket, and the solid-liquid separation bucket is connected with the freezing-out bucket. According to the device, the technical difficulties of low heat transfer coefficient and non continuous production in a gutta-percha freezing-out process are overcome. The device is reasonable in design, safe and reliable, relatively low in cost and convenient for large-scale industrialized production.
Owner:JISHOU UNIVERSITY

Reach stacker and container spreader

The invention discloses a container spreader, which comprises an opening and closing device for controlling the door of a container to be opened or closed. The opening and closing device is provided with a rotating arm and a driving device for driving the rotating arm to rotate. When the container is hoisted, the rotating arm is driven by the driving device to a position for pushing against the door of the container to be in a closed state; when the container is discharged, the rotating arm is driven by the driving device to rotate so as to be convenient for opening the door of the container. According to the container spreader disclosed by the invention, as the rotating arm which is driven by the driving device to rotate is arranged, the door of the container can be ensured to be in the closed state all the time in the hoisting process because the rotating arm pushes against the door of the container, thereby, the zero leakage of cargoes when the container is hoisted is simply and conveniently realized without other auxiliary tools. Moreover, when the container is discharged, the rotating arm is driven by the driving device to other positions, and thus, the limitation on the rotation of the door of the container can be removed, and the door of the container is opened so as to facilitate discharging, and the operation is simpler. The invention also discloses a reach stacker.
Owner:HUNAN SANY PORT EQUIP

A method for preparing bismuth titanate film layer based on micro-arc oxidation technology

The invention discloses a preparation method for a bismuth titanate film layer on the basis of micro-arc oxidation technology. The preparation method comprises the following steps: a bismuth sheet and a platinum sheet which are the same in size are respectively used as an anode and a cathode; the bismuth sheet is burnished with several pieces of sand paper with different meshes and polished with a polishing paste, and the cleaning and oil removal of the bismuth sheet are performed sequentially via alcohol and acetone for standby; electrolyte with titanium concentration of 0.01-0.10 mol / L is prepared; the bismuth sheet keeps a distance of 1-3 cm from the platinum sheet, the bismuth sheet and the platinum sheet are vertically immersed into the electrolyte in a depth of 2-4 cm, magnetic agitation is started, and 1-5A constant current is electrified for 5-10 min; electric sparks are continuously generated on the surface of the bismuth sheet, a deposition layer is synchronously generated, and the bismuth sheet with the deposition layer is flushed with ion water and then dried at a temperature of 60 DEG C for 2 h, as a result, a bismuth titanate film layer is obtained. The bismuth titanate film layer preparation method is mild in synthesis conditions, can be completed under the conditions of normal temperature and normal pressure, and is quick in reaction speed and simple in operation steps; used bismuth is an environmental-friendly raw material, the process is safe, and no hazardous substance is leaked and discharged, so that environmental protection is facilitated.
Owner:QINGDAO AGRI UNIV

Leaking stoppage construction process of sealing cap for oil plugging

The invention relates to a leaking stoppage construction process of a sealing cap for oil plugging. The leaking stoppage construction process is characterized by comprising the following specific construction processes: S1, performing construction preparation; S2, performing leak detection and marking; S3, polishing and cleaning; S4, fixing a sealing cap; S5, performing long-acting leaking stoppage; S6, performing sealing; and S7, performing leak detection. A pressure relief column on the sealing cap structure is kept in a smooth state, the sealing cap structure covers the leakage position, then the end of the sealing cap is connected with the leakage position in a gluing mode, and at the moment, leaked liquid can be discharged from the position of the inner threaded hole of the pressure relief column. After the leaking stoppage glue is solidified, a sealing ring is nested in a plugging bolt to be matched with the pressure relief column to achieve leaking stoppage of the leaking position. Even in a leakage state, the leakage stoppage can be completed without power failure or shutdown. The pressure relief column is arranged on the sealing cap structure, the pressure relief column is opened during leaking stoppage, the pressure relief column is plugged after the plugging glue is solidified, and leaking stoppage under the pressure state can be achieved.
Owner:南通世睿电力科技有限公司

Load Sensing Hydraulic System and Power Matching Control Method, Device and System

The invention relates to the technical field of engineering machinery, and discloses a load-sensitive hydraulic system, a power matching control method, device and system and an engineering machine. The load-sensitive hydraulic system, the power matching control method, device and system and the engineering machine are used for improving the control conformance, the dynamic responsiveness and the stability of the load-sensitive hydraulic system and the control performance of power matching. The load-sensitive hydraulic system comprises a variable pump assembly, a main control valve set, an actuator, an overflow valve and a flow control valve set. An oil inlet of the main control valve set is communicated with an oil outlet of the variable pump assembly, and a load-sensitive feedback oil path is arranged between a control oil port of the main control valve set and a control oil port of the variable pump assembly. Two oil ports of the actuator are communicated with two working oil ports of the main control valve set respectively. An inlet oil path of the overflow valve is communicated with the load-sensitive feedback oil path, and a switch valve is arranged on the inlet oil path of the overflow valve. An inlet oil path of the flow control valve is communicated with the load-sensitive feedback oil path, and the flow control valve comprises a proportional throttle valve and a first pressure-compensated valve arranged on an inlet oil path of the proportional throttle valve.
Owner:ZOOMLION HEAVY IND CO LTD

Oil mist sealing structure of a hydroelectric generator

The invention discloses an oil mist sealing structure of a hydraulic generator and belongs to the field of power generation equipment. The oil mist sealing structure is composed of a zero-clearance sealing part and a magnetic liquid sealing part, achieves rotary combined seal and is applicable to bearing oil mist seal of the hydraulic generator from the low speed to the high speed. A sealing shell of a combined sealing device is formed by connecting four bearing sealing covers through bolts. Firstly, four sealing split bodies are installed on the lower portions of the bearing sealing covers, composite flexible materials are adopted in the circumferential direction to connect the four sealing split bodies, zero-clearance sealing is formed under the radial and axial thrust effect of a small spring, and bearing oil mist is well sealed; then, by means of the magnetic liquid seal on the upper portions of the bearing sealing covers, the zero-leakage sealing effect is achieved; by combining the two kinds of seal, air pressure of a sealing cavity formed by the upper seal and the lower seal can be effectively kept, no negative pressure is produced in the cavity, overflow caused by the pressure difference between the high internal pressure and low bearing sealing cover external pressure can be effectively prevented, and the service life of the oil mist seal is prolonged.
Owner:ZIGONG ZHAOQIANG ENVIRONMENTAL PROTECTION TECH

Electrostatic adsorption disc for preventing circulating liquid from leaking

The invention relates to the field of wafer process devices, and discloses an electrostatic adsorption disc for preventing circulating liquid from leaking, namely an embedded plate-shaped valve body, a valve plate and a valve plate propulsion controller are embedded in a circulating liquid through hole in the bottom surface. The valve plate propulsion controller drives the valve plate to extend into the circulating liquid through hole and cut off the circulating liquid through hole, so that the circulating liquid remaining in an internal pipeline of the electrostatic adsorption disc in the subsequent removal process does not drip out through the circulating liquid through hole, and the purpose of preventing the circulating liquid from leaking is achieved. Finally, the dirt wiping action after removal and the time required for removing the adsorption disc can be greatly reduced, the replacement efficiency is improved, the concentration of total volatile organic compounds in the air around the device can be prevented from being increased, the deployment cost and replacement cost of the organic matter filter are reduced, and the maintenance period of the filter is prolonged. The increase of metal loss defects can be effectively prevented, and the high yield of final wafer products is ensured.
Owner:上海谙邦半导体设备有限公司
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