The invention discloses a
zinc gallate film prepared by a two-
step method, and a preparation method and application thereof, and belongs to the technical field of
semiconductor materials. The invention provides a method for preparing a
zinc gallate film through a two-
step method. The method comprises the following steps that a C-face
sapphire substrate is pretreated, surface impurities and water are removed, and a pretreated
sapphire substrate is obtained; mixing the
gallium acetylacetonate solution and the
zinc acetylacetonate solution, adding
hydrochloric acid, stirring until the mixture is completely dissolved, and standing to obtain supernatant liquid; under the normal pressure condition,
inert gas is used as current-carrying gas, the supernatant liquid is subjected to
ultrasonic atomization treatment and then conveyed to the surface of the pretreated
sapphire substrate, a nucleating layer is formed through deposition at the temperature of 500-550 DEG C, then the temperature is increased to 600-650 DEG C, an epitaxial film is formed through deposition, and the
single crystal spinel zinc
gallate thin film is obtained. The zinc gallate thin film with higher quality is prepared through a two-
step method.