The invention discloses a 
nitride epitaxial layer preparation method and a 
semiconductor epitaxial 
wafer thereof. The method comprises the following steps: providing a substrate; a buffer layer is grown on the substrate, the buffer layer comprises a 
nitride buffer layer and an 
oxygen-containing buffer layer, and the 
nitride buffer layer and the 
oxygen-containing buffer layer are grown by alternately switching an MO source and an 
oxygen-containing MO source in a periodic cycle mode to serve as precursor materials; and growing a nitride epitaxial layer on the buffer layer. The oxygen-containing buffer layer is grown through the oxygen-containing MO source process, on one hand, the in-situ growth oxygen-containing buffer layer has good 
lattice mismatch relaxation, relieves lattice 
adaptation and releases the stress of the substrate and the epitaxial layer, and a high-quality 
gallium nitride epitaxial layer with low 
dislocation density can be obtained; the 
distribution uniformity and 
nucleation density of oxygen-containing buffer 
crystal grains are improved, and a high-quality nitride epitaxial layer is obtained; on the other hand, the technological process is simple, 
pollution risks in the substrate and epitaxial layer transfer process are reduced, 
repeatability is good, and large-scale production is facilitated.