The invention discloses a
semiconductor device terminal structure and a preparation method thereof, the
semiconductor device terminal structure comprises a wide bandgap N-type doped substrate, an N-type doped drift region, a P-type doped buried layer and an N-type doped current
diffusion layer, a main junction region is formed at one end, close to an
anode, of the terminal structure, a
cutting channel is formed at one end, far away from the
anode, of the terminal structure, and a terminal region is formed in the middle of the terminal structure; the upper portion of the terminal area is etched into a groove terminal comprising a main groove and an auxiliary groove, the main groove spans the P-type doped main
junction area and goes deep into the N-type doped current
diffusion layer, the auxiliary groove is etched in the bottom face of the main groove, and the auxiliary groove comprises a middle groove and a side groove. The middle groove penetrates through the P-type doped buried layer, the bottom of the middle groove is located in the N-type doped drift region, the side grooves are located in the direction from the main junction region to the terminal region, the distance between the side grooves in the direction from the
cutting channel region to the terminal region is gradually reduced, and / or the size is gradually increased; the P-type doped buried layer with gradually reduced equivalent
doping concentration can be reduced, and the problem of
electric field concentration near a main junction region and a
cutting channel can be relieved.