This invention discloses a method for preparing a single-component InP
polishing slurry, belonging to the technical field of
polishing slurry. The
polishing slurry comprises the following components by
mass percentage: 1%–20% modified
colloidal silica, 0.01%–5% oxidant, 0.001%–1%
metal corrosion inhibitor, 0.001%–0.6% surfactant, with the balance being a pH adjuster and deionized water; the pH adjuster is used to adjust the pH of the polishing slurry to 2.0–5.0. The modified
colloidal silica is obtained by surface
grafting modification of ordinary
colloidal silica with a specific
bisphosphonate-sulfonylimide
silane coupling agent. The
bisphosphonate groups in this structure can strongly chelate the InP surface, enhancing chemical
cutting and improving the removal rate; the sulfonylimide groups ionize to provide a high
negative charge, which, in
synergy with steric hindrance, endows the polishing slurry with excellent long-term storage stability. This invention provides a ready-to-use, highly stable, high-removal-rate, and ultra-
smooth surface-forming single-component polishing slurry.