The application discloses an ultralow-energy monochromatic
electron beam generation and transmission device, and relates to the technical field of
electron optical instruments, which comprises the following units arranged in sequence along an
electron beam transmission path: an electron generation unit for generating an initial electron beam; an injection lens unit for receiving the initial electron beam generated by the electron generation unit; a
monochromator unit having an inlet and an outlet and being used for energy screening of the electron beam from the injection lens unit to reduce energy spread thereof; and a deceleration and focusing lens unit for receiving the monochromatized electron beam output from the outlet of the
monochromator unit. The device can output an ultralow-energy electron beam with a continuously adjustable energy of 0 eV to 5 eV through the
cooperative work of the electron generation unit, the injection lens unit, the
monochromator unit and the deceleration and focusing lens unit, and the energy spread is better than 90 meV, thereby improving beam monochromaticity and transmission efficiency.