The invention provides a preparation method of an aluminum
oxide polishing solution applied to
gallium arsenide, and relates to the field of
polishing materials.The preparation method comprises the steps that a protective layer is formed on the surface of an aluminum
oxide raw material through a protective agent, then strong acid is added for ball milling,
centrifugal separation is conducted after ball milling, washing is conducted to be neutral, neutral
sediment is obtained, the neutral
sediment is filtered after being dried, and the aluminum
oxide polishing solution is obtained; the method comprises the following steps: firstly, pre-treating an
alumina raw material, then removing gamma-phase
alumina in the
alumina raw material to obtain pre-treated alpha-phase alumina, then adding a
copolymer dispersant to enable the
dispersion stability of the alpha-phase alumina to be higher, and then adding a chelating agent and an
oxidizing agent to form a polishing solution finished product. According to the preparation method, the purity of alpha-phase aluminum oxide is improved, the
dispersity of the
grinding material is further guaranteed by combining the steric hindrance effect of the
copolymer dispersing agent, the alpha-phase aluminum oxide and the
copolymer dispersing agent are in synergistic interaction, and the polishing rate and the polishing quality are improved.