The invention discloses an edge
exposure device. The edge
exposure device comprises an adsorption and rotating platform for adsorbing and driving a
silicon chip to rotate, a motor for supplying power for the adsorption and rotating platform, an edge
exposure lens
assembly comprising an edge exposure
camera lens and an exposure spot monitoring lens, wherein along an
optical propagation direction, the edge exposure
camera lens orderly comprises an exposure
light source, first and second fly-eye lenses, a first cylindrical surface
zoom lens group and a second cylindrical surface
zoom lens group orthogonal to the first cylindrical surface
zoom lens group, and a controller for controlling the motion of the motor, the edge exposure
camera lens and the exposure spot monitoring lens. Through respective adjustment of combined
focal length of the first cylindrical surface
zoom lens group and the second cylindrical surface
zoom lens group, edge exposure field length and width are controlled respectively, through cooperation of the first and second fly-eye lenses and the first and second cylindrical surface
zoom lens groups, an exposure field is obtained, and through coaxial exposure field
light spot imaging or energy detection light path, automatic focusing, exposure dosage and exposure size monitoring functions are obtained.