The invention discloses a method of filling a groove structure with tungsten, which comprises the following steps: S1, forming a first groove in a first dielectric layer; S2, forming a first barrier layer; S3, carrying out a first tungsten deposition and chemical mechanical grinding process to form a first tungsten layer; S4, forming a second dielectric layer; S5, forming a second groove superimposed directly above the first groove; S6, forming a second barrier layer; S7, removing the second barrier layer from the bottom surface of the second groove and the outer surface of the second groove;and S8, carrying out second tungsten deposition from bottom to top to form a second tungsten layer. By using the method of the invention, seamless filling of tungsten can be realized, and the qualityof a tungsten-filled groove structure can be improved.