The invention discloses a 5G chip processing technology. The 5G chip processing technology comprises the following steps of: 1, carrying out primary cutting, grinding and lapping treatment on a gallium nitride wafer; 2, placing the lapped gallium nitride wafer on a precision polishing instrument for fine polishing treatment; and 3, washing the surfaces of the gallium nitride wafer after fine polishing with a cleaning agent, and then drying to obtain a radio-frequency chip material, wherein the precision polishing instrument in the step 2 comprises a protection box, a polishing bin, a driving bin, a bearing plate, a polishing groove, a maintaining mechanism, an ejecting device, a polishing device, a stroke device, an upper cover plate, a supercharging device arranged on the upper cover plate and a liquid feeding device arranged on the polishing bin. The flatness of the surfaces including the front surface and the back surface of the gallium nitride wafer can be improved to a new level through the precision polishing instrument, so that a 5G chip with better quality is produced, and the requirement of 5G communication is met.