The utility model provides a kind of
coating tool and platform, comprising:
coating frame extends along first direction, first direction is perpendicular to the
coating direction of coating tool, multiple accommodating grooves are located the side of coating frame towards
coated surface, multiple accommodating grooves are arranged along first direction;Accommodating groove includes opening cavity and accommodating cavity, opening cavity is communicated with accommodating cavity, the cross-sectional width of opening cavity is less than the cross-sectional width of accommodating cavity, coating knife includes the support column extending along second direction, and the blade being connected with the first end of support column;Support column penetrates opening cavity, and the length of support column is greater than the cross-sectional length of opening cavity in second direction;Second direction is perpendicular to the plane where first direction and coating direction are located, the blade of multiple coating knives is adjacent, elastic member is located in accommodating cavity, and elastic member is respectively connected with the cavity bottom of accommodating cavity and the second end of support column;Elastic member can be elastically deformed in second direction, suitable for the
wafer of different warping degrees in each area.