The invention discloses a solar battery piece diffusion process. The solar battery piece diffusion process comprises the following steps of B, heating a furnace chamber of a diffusion furnace to a first temperature, and continuously introducing pure nitrogen; C, maintaining the furnace chamber at the first temperature, and introducing pure nitrogen and oxygen to the furnace chamber to oxidize thebattery piece; D, carrying out low-temperature diffusion at the first temperature, and continuously introducing pure nitrogen, phosphorus source-carrying nitrogen and oxygen into the furnace chamber in the process; E, heating the furnace chamber of the diffusion furnace to a second temperature, simultaneously pumping phosphorus atoms, and continuously introducing pure nitrogen; F, maintaining thefurnace chamber at the second temperature and carrying out high-temperature diffusion, and continuously introducing pure nitrogen, phosphorus source-carrying nitrogen and oxygen into the furnace chamber in the process; G, heating the furnace chamber of the diffusion furnace to a third temperature, and simultaneously pumping the phosphorus atoms, and continuously introducing pure nitrogen; H, continuously pumping the phosphorus atoms at the third temperature, and continuously introducing pure nitrogen and oxygen into the furnace chamber in the process; and I, performing cooling and carrying outoxidation and simultaneously pumping the phosphorus atoms, and continuously introducing pure nitrogen and oxygen into the furnace chamber in the process.