The invention relates to a method and a device for separating and refining
nitrogen trifluoride and carbon
tetrafluoride. The crude
nitrogen trifluoride gas enters an adsorber in an adsorption state, an adsorbent selectively adsorbs carbon
tetrafluoride, and a high-purity
nitrogen trifluoride product is obtained at an outlet; meanwhile, hot
inert gas is utilized to purge the adsorber in a
desorption state, outlet regenerated gas enters a compressor after being cooled, and the regenerated gas enters a membrane separation
assembly after being compressed; carbon
tetrafluoride is used as
permeation gas to permeate through the separation membrane, and residual
waste gas is discharged to an incinerator. Main equipment comprises an adsorber in an adsorption state, an adsorber in a
desorption state, a regeneration
gas heater, a regeneration
gas cooler, a compressor, a membrane separation
assembly and the like. According to the method,
nitrogen trifluoride and carbon tetrafluoride are separated through temperature swing and
pressure swing adsorption, carbon tetrafluoride is efficiently and selectively adsorbed through the adsorbent to obtain the high-purity
nitrogen trifluoride product, carbon tetrafluoride is separated and recycled through the membrane separation
assembly, and the method has the advantages of being high in product purity and yield, low in cost and simple in process.