The application discloses a high-purity electronic special gas storage and
separation method, and belongs to the technical field of
chemical adsorption. 2+ The adsorption medium is an ordered three-dimensional microporous
metal organic framework material formed by coordination of Co 2+ , Zn 2+ or Fe 2+ and 1,5-dihydrobenzo[1,2-d:4,5-d']bis([1,2,3]
triazole) or 1,7-dihydrodibenzo[b,e][1,4]dioxin[2,3-d:7,8-d']bis([1,2,3]
triazole). The application can realize efficient storage and separation and purification of electronic special gases such as SF6, NF3, C3F6, CF4, BF3, C2F6, C3F8, CHF3, CF3I, C2F5I, SiH4, Si2H6, AsH3, GeF4, BCl3, WF6, AsF3 and ClF3, and can realize regulation of pore size and change of pore chemical environment through
metal ion exchange and
metal cluster coordination functional group modulation, so that specific electronic special gas guest molecules can be accurately identified, and efficient storage and separation and preparation of high-purity electronic special gases can be realized.