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Miniature flexible surface acoustic wave sensor with adjustable bandwidth and design and preparation method thereof

PendingCN121786906AOvercome the single resonance peak limitationWorking bandwidthGeometric CADImpedence networksSurface acoustic wave sensorAcoustics
The invention discloses a frequency-adjustable bandwidth micro flexible surface acoustic wave sensor and a design and preparation method thereof. Structural design parameters and a structural design range are selected according to structural characteristics of an SAW sensor; structural design parameters, a substrate material and an electrode material are used as optimization objects, eigenvalue quality factors corresponding to all step length nodes of to-be-optimized parameters are obtained through finite element simulation calculation, a proper function fitting method is selected, function fitting is conducted on quality factors corresponding to the to-be-optimized parameters, and the quality factors corresponding to the to-be-optimized parameters are obtained; obtaining a fitting function of the to-be-optimized parameters; and optimizing the fitting function of the plurality of to-be-optimized parameters based on a multi-parameter particle swarm optimization algorithm to obtain optimized structural design parameters of the SAW sensor. A flexible substrate structure is prepared by adopting a high-precision electric field driven spray deposition 3D printing technology, and the whole SAW sensor structure is prepared by utilizing a high-precision photoetching technology. The problems that an existing SAW sensor is narrow in signal resonant frequency, large in size and poor in flexibility are solved, the stability of the SAW sensor in a complex environment is improved, and the measurement range of the SAW sensor in the complex environment is widened.
Owner:JIANGSU UNIV