168results about How to "Eliminate deposits" patented technology

A high pressure, high throughput, single wafer, semiconductor processing reactor is disclosed which is capable of thermal CVD, plasma-enhanced CVD, plasma-assisted etchback, plasma self-cleaning, and deposition topography modification by sputtering, either separately or as part of in-situ multiple step processing. The reactor includes cooperating arrays of interdigitated susceptor and wafer support fingers which collectively remove the wafer from a robot transfer blade and position the wafer with variable, controlled, close parallel spacing between the wafer and the chamber gas inlet manifold, then return the wafer to the blade. A combined RF/gas feed-through device protects against process gas leaks and applies RF energy to the gas inlet manifold without internal breakdown or deposition of the gas. The gas inlet manifold is adapted for providing uniform gas flow over the wafer. Temperature-controlled internal and external manifold surfaces suppress condensation, premature reactions and decomposition and deposition on the external surface. The reactor also incorporates a uniform radial pumping gas system which enables uniform reactant gas flow across the wafer and directs purge gas flow downwardly and upwardly toward the periphery of the wafer for sweeping exhaust gases radially away from the wafer to prevent deposition outside the wafer and keep the chamber clean. The reactor provides uniform processing over a wide range of pressures including very high pressures. A low temperature CVD process for forming a highly conformal layer of silicon dioxide is also disclosed. The process uses very high chamber pressure and low temperature, and TEOS and ozone reactants. The low temperature CVD silicon dioxide deposition step is particularly useful for planarizing underlying stepped dielectric layers, either alone or in conjunction with a subsequent isotropic etch. A preferred in-situ multiple-step process for forming a planarized silicon dioxide layer uses (1) high rate silicon dioxide deposition at a low temperature and high pressure followed by (2) the deposition of the conformal silicon dioxide layer also at high pressure and low temperature, followed by (3) a high rate isotropic etch, preferably at low temperature and high pressure in the sane reactor used for the two oxide deposition steps. Various combinations of the steps are disclosed for different applications, as is a preferred reactor self-cleaning step.

A substrate processing apparatus capable of removing deposits attached on a component of a lower temperature in a gap between two components, temperatures of which are greatly different from each other, without degrading a working ratio of the substrate processing apparatus. In the substrate processing apparatus, a chamber receives a wafer, a focus ring surrounds the wafer disposed in the chamber, a side surface protective member transmits a laser beam, a laser beam irradiating apparatus irradiates the laser beam to the side surface protective member, an inner focus ring of the focus ring is disposed adjacent to the wafer and is cooled down and an outer focus ring surrounds the inner focus ring and is not cooled down in a focus ring, and a facing surface of the side surface protective member faces a gap between the inner focus ring and the outer focus ring.

The invention provides a cleaning liquid for semiconductor devices which is capable of removing deposits on a surface of an object to be cleaned including a photoresist, an antireflective film, an etching residue and an ashing residue at a low temperature in a short period of time with reduced environmental burdens and without causing corrosion of an interlayer dielectric film, a metal, a metal nitride, and an alloy in the object to be cleaned. The cleaning liquid for semiconductor devices according to the invention contains a reducing agent and a surfactant and has a pH of 10 to 14.

The invention discloses a self-cleaning method for an EGR valve. An ECU of an engine controls action of the EGR valve, the self-cleaning method comprises the steps that the ECU sends a preset command signal to control the self-cleaning action of the EGR valve, and the EGR valve conducts fully closing action and fully opening action to produce vibration till the self-cleaning process is over. By means of the self-cleaning method, sediments gathered on the EGR valve are effectively removed, the stable and reliable working state of the EGR valve is guaranteed, and the service life of the EGR valve is prolonged.

The invention relates to a process for regenerating catalysts for conversion of hydrocarbons, the catalyst generally comprising at least one precious metal, preferably a group VIII metal from the periodic table of the elements, optionally at least one additional metal, at least one halogen and at least one porous substrate, the process according to the invention having at least one combustion step for the spent catalyst and at least one oxyhalogenation step, these steps being performed in a same, single regeneration zone in which the catalyst to be regenerated is located in the form of a fluidized bed.

The invention discloses a solid oxide fuel cell with symmetrical electrodes and a preparation method and application thereof. The solid oxide fuel cell has the following symmetrical structure: an electrocatalysis membrane electrode deposited on the inner wall of the pore of a porous electrolyte, a compact electrolyte layer and another electrocatalysis membrane electrode deposited on the inner wall of the pore of the porous electrolyte. The preparation method comprises the following steps: preparing a porous electrolyte/compact electrolyte/porous electrolyte skeleton structure and an electrocatalysis membrane electrode infiltration precursor solution; infiltrating the prepared porous electrolyte/compact electrolyte/porous electrolyte skeleton structure in the electrocatalysis membrane electrode infiltration precursor solution by using an impregnation method; and carrying out heat treatment. The cell provided by the invention has the advantages of good thermal expansion coupling performance, good thermal shock resistance, low cost, a short preparation period, etc.; and when hydrocarbon is used as a fuel, carbon deposition on the positive electrode of the cell can be effectively prevented, and the cell can be used as an electrolytic bath and has commercialization prospects.

This invention, which pertains to the field of testing of the corrosion-resistance of materials, includes devices (a probe formed by a permanent reference electrode with corrosion coupons and an electronic switch) and a measurement method for evaluating the probability of corrosion of buried ducts due to alternating current (AC), and aims at providing a methodology that eliminates ohmic losses and allows the desired measurement to be obtained. For that purpose, a probe formed by a permanent copper or copper sulphate reference electrode (ECSC) with four corrosion coupons was developed, and an electronic switch which was also developed within the scope of this invention is coupled to this probe. This assembly (probe and switch), associated with a preferably portable digital oscilloscope or a data acquisition device with digital signal processing (DSP), makes it possible to obtain the waveform of the pipe/ground potential AC+DC off, and hence the peak potential of this waveform, this value being used to predict the corrosion of buried, cathode-protected ducts due to alternating current, on the basis of the criterion that corrosion due to alternating current will not occur or will be insignificant if the peak of the waveform of the pipe/ground potential AC+DC off is more negative than −0.85 V_ECSC. The present invention can also be directly used for monitoring external corrosion of ground ducts and to verify the real cathode protection potential of these ducts. In order to ensure the integrity of the ducts, this equipment can be installed at test points, at valve boxes and cathode protection rectifiers, as well as in zones where corrosion is suspected.

A process for repairing a metallic shroud of a gas turbine blade includes a step of removing a portion of an anti-wear layer to a removal depth that is greater than a depth of wear of the anti-wear layer. Further, the process includes a step of leaving a trace of the anti-wear layer to subsist, wherein the trace of the anti-wear layer extends at least in a re-entrant zone of the Z profile of the blade. The process also includes a step of depositing a new layer of anti-wear material on the trace of the anti-wear layer.

The invention is a hybrid cooling system for condensing the exhaust steam of a steam turbine (10), which cooling system comprises a dry cooling circuit (11), a dry air-cooled unit (12) performing heat dissipation of cooling water flowing therein, and a wet cooling circuit (14) and a wet cooled unit (15) performing heat dissipation of the cooling water flowing therein. According to the invention, the cooling water flowing in the dry cooling circuit (11) is separated from the cooling water flowing in the wet cooling circuit (14), and the dry and wet cooling circuits (11, 14) are connected to a common condenser.

Protective barrier for snowstorms, for installation near communication routes in order to prevent the accumulation of snow or sand on the road. The barrier is formed by joining several screens made of a set of blades that are arranged horizontally, superposed on one another at regular distances, joined with vertical posts by anchoring their ends to several rectangular plates that are inserted in the vertical post using a ring on the plate.

The invention relates to a chilli sauce and a preparation process thereof, in particular to a healthy chilli sauce and a preparation process thereof. The healthy chilli sauce is high in nutritional ingredients, non-irritant to the stomach and intestines, and long in shelf life. The healthy chilli sauce disclosed by the invention comprises the following ingredients in parts by mass: 20 parts of chilli powder, 16-20 parts of flour or yeast flour, 16-20 parts of soybean paste, 16-20 parts of water, 4-6 parts of salt, 3-5 parts of edible alcohol, 3-5 parts of chilli seed oil, 4-6 parts of polished glutinous rice flour, 2-4 parts of sesame oil, 1.5-2.5 parts of malt syrup, 2-4 parts of an accessory A and 1.5-2.5 parts of an accessory B. The preparation process of the healthy chilli sauce disclosed by the invention comprises the following main steps: mixing the raw materials, liquefying, sterilizing and fermenting. The chilli sauce prepared by the preparation process disclosed by the invention is high in nutritional ingredients, non-irritant to the stomach and intestines and long in shelf life, and has health maintenance effects. The preparation process disclosed by the invention is applied to the field of chilli sauce production.

The invention relates to a lead acid battery charging method and a device. The lead acid battery charging device charges a lead acid battery, wherein a constant current pulse power is used for charging the lead acid battery; the pulse current Ip of the constant current pulse power is larger than the discharging current If of the lead acid battery when a backup power works; moreover, the pulse current Ip is more than 0.1 C; and C is the nominal capacity of the lead acid battery. The lead acid battery charging method comprises the steps of adopting the pulse current to charge, and adjusting theduty factor of the pulse current according to the voltage of the battery to realize the average charging current variation at different charging periods, and reduce the water loss in the charging process. Meanwhile, charging under a large enough pulse current can eliminate the acid corrosion and oxide precipitate occurring at the bottom part of the battery caused by the long term fixation of the lead acid battery. The invention adopts the form of regularly supplementing to replace the traditional floating charging at constant voltage, which reduces the phenomena caused by long term floating charging such as water loss of the lead acid battery, unit cell unbalance of battery and the like, and prolongs the service life of the lead acid battery.

The invention discloses an application of gastrodin to preparing medicaments for preventing and treating Alzheimer's disease. Alzheimer's disease (AD) is a neurodegenerative disease, and pathological characteristics comprise neuro fibrillary tangles formed in cells, hyperplasia of reactive microglia and glial cell, and the like, wherein the extracellular deposition of amyloid A beta is the main pathogenetic reason of AD. An AD small mouse taking a gastrodin-containing fodder is substantially improved in spatial-memory learning ability, substantially reduced in A beta level in brain and serum, and substantially reduced in amyloid plaques and microglia in brain tissue, and thus it is indicated that gastrodin is capable of preventing A beta deposition and decreasing active components causing AD mouse brain gastrodin.

Self-aligning vias and trenches etched between adjacent lines of metallization allows the area of the dielectric substrate allocated to the via or trench to be significantly reduced without increasing the possibility of electrical shorts to the adjacent lines of metallization.

The invention relates to a pretreatment method and a device for a hard alloy cutter before diamond coating deposition. The device comprises a furnace body, a hearth, an electric heater, plasma generating power supply and a sample table. The pretreatment method comprises the steps of chemical micro-etching, plasma activation, plasma enhanced gaseous boronizing and plasma cleaning on the surface ofthe hard alloy cutter. According to the invention, plasma equipment is clamped on a constant temperature tube furnace, equipment obtained by reforming a bias device is added, and a set of appropriateprocesses are added to solve the problems in the prior art. The equipment provided by the invention has a simple structure and convenient operation, realizes plasma activation, plasma enhanced gaseousboronizing and plasma cleaning of workpieces, optimizes the existing microwave plasma gaseous boronizing process, greatly reduces the process cost, has good boronizing effect, and is suitable for large-scale industrial production.

This invention discloses a chemical method for removing stainless steel oxide layer. The method comprises: soaking 2205 bi-phase stainless steel belt in an acid-washing pool filled with acid-washing solution. The acid-washing solution comprises: sulfuric acid 230-260 g/L, sodium sulfite 60-100 g/L, sodium chloride 40-60 g/L, sodium nitrate 15-30 g/L, sodium borofluoride 50-80 g/L, thiourea 4-8 g/L, oxalic acid 60-100 g/L, and water as balance. The temperature of the acid-washing solution is 50-70 deg.C. The soaking time of 2205 bi-phase stainless steel belt in the acid-washing pool is 40-60 min. The acid-washing solution is stirrer by aeration during the acid washing process. The method is especially suitable for acid-washing 2205 bi-phase stainless steel belt.

The invention provides an exhaust purification device, an exhaust purification method and a particulate matter measurement method. The exhaust purification device includes: a main diesel particulate filter arranged in an exhaust pipeline of a diesel engine; an auxiliary exhaust pipeline branched from the exhaust pipeline from the upstream side of the main diesel particulate filter; a sub diesel particulate filter provided in the sub exhaust line, the sub diesel particulate filter having a soot storage capacity smaller than that of the main diesel particulate filter; and a differential pressure measuring portion with to measure the differential pressure between the inlet and outlet of the secondary diesel particulate filter.

The present invention relates to a dosing system for dosing a first fluid, preferably flowing in a first flow passage (5) into a stream of a second fluid, preferably flowing in a second flow passage (9). The system may e.g. be used to dose a reducing agent into an exhaust gas from a combustion engine (1). The system comprises a valve (6), a nozzle (3) having an outlet arranged downstream of the valve (6), a flow passage (5) through which the first fluid can flow from a reservoir (4) to the nozzle outlet via the valve (6), and a control system (7) adapted to receive input from one or more sensors (8) and based thereon determine a request value based on which a valve opening period is determined. The valve opening period is different from zero and independent on the request value when the request value is below a predefined threshold value. The invention further relates to an exhaust system comprising such a dosing system and to a method of dosing a first fluid into a stream of a second fluid by use of such a dosing system.

The present invention relates a lubricant and/or clean-out composition comprising: (a) a dispersant component comprising a succinimide dispersant and/or a quaternary ammonium salt dispersant; (b) a carrier fluid component; and (c) an optional corrosion inhibitor, as well as methods of cleaning out deposits in a lubricant system, such as a hydraulic system, using such compositions.

The invention discloses a protein powder middle-dimensional capsule, which is characterized by the following: adopting refined soy and pollen to allocate pollen group with fat less than 2wt%, water less than 7wt% and sand content less than 0.03wt%.