The invention relates to a method for preparing a film on a large-area substrate through magnetron sputtering. The method comprises the steps that the film is prepared on the substrate with the diameter of 6 inches through a target material with the diameter of 2 inches, wherein the distance between the target material and the substrate is smaller than or equal to 17 cm, the included angle betweenthe target material and the substrate is smaller than or equal to 90 degrees, and the non-uniformity of the thickness of the obtained film is smaller than or equal to 5%. According to the method, the2-inch target material is used, the 6-inch film is prepared by adjusting the included angle between the target material and the substrate, the target-substrate distance and other factors, the non-uniformity of the thickness of the obtained film is smaller than or equal to 5%, and compared with an existing method that a 2-inch target material can only be used for preparing a 4-inch film, the novelmethod has obvious improvement and is improved in the respects of film forming quality and efficiency, cost saving and the like; then, 6-inch film material with good uniformity can be prepared on different material interfaces through the novel method; and according to the method, the overall structure is simple, the functions are comprehensive, a research method is provided for magnetron sputtering coating of a small target and a large substrate, the coating efficiency is improved, and the coating cost is reduced.